Electrostatic Particle Removal in Semiconductor Treatment Solution Supply
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Solution Overview
Problem
Conventional filters struggle to completely remove fine particles of nanometer order from treatment solutions used in semiconductor manufacturing, leading to defects and increased maintenance costs due to clogging.
Innovation Solution
A treatment solution supply apparatus with electrodes that apply a DC voltage to the treatment solution, allowing for the collection and removal of fine particles, and a cleaning solution supply system to reverse polarity and drain collected particles, maintaining the system's cleanliness without filter replacement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the number of meshes of the filter is decreased to remove fine particles, then the filter manufacturing cost increases due to advanced processing techniques, but the filter can remove fine particles of nanometer order
Solution Approach 1:
The patent replaces the mechanical filtration system with an electrostatic collection system. Instead of using a physical filter with meshes to mechanically block particles, the invention uses electrodes that generate an electric field to collect charged fine particles from the treatment solution. This substitution eliminates the need for complex high-mesh filters while achieving effective fine particle removal.
Solution Approach 2:
The invention changes the parameter of particle collection from physical mesh size to electrical charge properties. By utilizing the electrostatic charge on particles and applying DC voltage to electrodes, the system collects particles based on their charge rather than physical size filtering. This parameter change allows removal of nanometer-order particles without requiring advanced filter manufacturing techniques.
2Manufacturing precision
If the number of meshes of the filter is decreased to remove fine particles, then the filter differential pressure increases and clogging occurs more frequently, but fine particle removal is achieved
Solution Approach 1:
The patent replaces the mechanical filtration system with an electrostatic collection system. Instead of using a physical filter with meshes that physically block particles (causing clogging), the invention uses electrodes that generate an electric field to collect charged fine particles from the treatment solution. This substitution eliminates the clogging problem inherent in mechanical filters while achieving effective fine particle removal.
Solution Approach 2:
The invention extracts the fine particles from the treatment solution through electrostatic collection by electrodes, separating the particle collection function from the main solution flow path. This extraction mechanism prevents particles from accumulating and clogging the system, as collected particles are removed through the particle discharge port rather than blocking the flow path.
3Manufacturing precision
If a conventional filter is used to remove fine particles, then the filter requires frequent maintenance due to clogging, but fine particle removal is attempted
Solution Approach 1:
The patent replaces the mechanical filtration system with an electrostatic collection system. Instead of using a physical filter that requires frequent maintenance due to clogging, the invention uses electrodes that collect particles through electrostatic attraction. The collected particles are periodically discharged through the particle discharge port, eliminating the need for frequent filter replacement or cleaning maintenance.
Solution Approach 2:
The electrostatic particle collection system performs self-cleaning through periodic particle discharge. By reversing the polarity of the DC voltage applied to the electrodes, the system automatically discharges collected particles through the particle discharge port, maintaining its collection efficiency without requiring external maintenance or filter replacement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Efficient removal of nanometer-scale particles from treatment solutions, reducing defects and maintenance needs, while maintaining system cleanliness and preventing clogging.
Implementation Method 1
electrodes that are provided at the treatment solution supply pipe and apply a DC voltage to the treatment solution in the treatment solution supply pipe
Implementation Method 2
a power supply unit that applies the DC voltage to the electrodes while freely reversing a polarity of the DC voltage
Data Source
AI summary
A treatment solution supply apparatus that supplies a treatment solution from a treatment solution supply source via a treatment solution supply pipe to a supply nozzle, includes: electrodes that are provided at the treatment solution supply pipe and apply a DC voltage to the treatment solution in the treatment solution supply pipe; a power unit that applies the DC voltage to the electrodes while freely reversing a polarity of the DC voltage; a cleaning solution supply pipe connected to the treatment solution supply pipe and configured to supply a cleaning solution from a cleaning solution supply source to the treatment solution supply pipe; and a waste solution pipe that drains the cleaning solution passed through a position of the treatment solution supply pipe where the electrodes are provided.