Electrostatic Precipitator for Explosive Gas Using Indirect Ion Charging
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Solution Overview
Problem
Conventional methods for processing semiconductor exhaust gases, such as scrubbers, HEPA filters, and electric dust collection, face issues like wastewater treatment problems, low fine particle removal efficiency, process pressure changes, and explosion risks due to explosive gas characteristics, and are inadequate for completely removing particulate materials like SiO2.
Innovation Solution
An electrostatic precipitation device with a charging chamber, ion injection parts, and a dust collection chamber, utilizing unipolar high voltage application plates, ion collection plates, and a water screen forming portion to charge and collect particles in explosive exhaust gases, preventing direct discharge and explosion risks while effectively removing particulate materials.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If electric dust collection method is used, then dust removal efficiency is improved, but explosion occurs due to discharge in explosive gas
Solution Approach 1:
The patent introduces an intermediary ionization chamber between the exhaust gas source and the dust collection chamber. This intermediary chamber ionizes the explosive gas particles before they enter the high-voltage dust collection section, transforming the gas from a direct discharge risk to a controlled ionized state that can be safely collected without causing explosions.
Solution Approach 2:
The dust collection device is divided into multiple sections: an ionization chamber for initial particle charging and a separate collection chamber for dust removal. This segmentation allows the system to handle explosive gases safely by separating the ionization function from the high-voltage collection function, preventing direct discharge in explosive atmospheres.
2Productivity
If scrubber is used, then dust removal is achieved, but wastewater treatment problem occurs and fine particle removal performance is low
Solution Approach 1:
The patent replaces the wet mechanical scrubbing system with an electrostatic field-based dust collection system. Instead of using liquid scrubbers that generate wastewater, the invention uses electric fields to charge and collect particles, eliminating the need for water treatment while maintaining effective dust removal capability.
3Productivity
If HEPA filter is used, then dust removal is achieved, but process pressure change occurs due to back pressure
Solution Approach 1:
The patent replaces the mechanical filtration system (HEPA filter) with an electrostatic field-based collection system. The electrostatic precipitator uses electric fields to attract and collect particles without creating significant back pressure, thereby maintaining stable process pressure while achieving effective dust removal.
4Manufacturing precision
If conventional electrostatic dust collection is used, then dust removal efficiency is improved, but explosion occurs due to discharge characteristics of explosive gas
Solution Approach 1:
The patent introduces an intermediary ionization chamber that acts as a mediator between the explosive gas source and the high-voltage collection system. This intermediary section ionizes the gas particles at low voltage, allowing them to be safely collected in the subsequent high-voltage section without causing explosions, thus maintaining high removal efficiency while eliminating the explosion hazard.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device prevents explosions by not directly discharging into explosive exhaust gases and achieves high efficiency in removing particulate materials like SiO2 through unipolar charging and electrostatic dust collection, ensuring safe and clean gas discharge.
Implementation Method 1
a charging unit including a first high voltage application plate that is installed within the charging chamber and to which a unipolar high voltage is applied
Implementation Method 2
an electrostatic dust collection unit that is installed within the dust collection chamber and including a second high voltage application plate, a collection plate that is spaced apart from the second high voltage application plate to be grounded
Data Source
AI summary
There is provided an electrostatic precipitation device of explosive exhaust gas particles that can remove by unipolar charging a particulate material such as SiO.sub.2 that is included in an explosive exhaust gas by charging the explosive exhaust gas with an indirect charging method of charging through ions that are injected from the outside.