Electrostatic Sensor Shield Wiring for Interconnect Fault Localization
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Solution Overview
Problem
Conventional electrostatic capacitance detectors cannot determine which interconnect to a shield electrode is experiencing an abnormality, such as disconnection.
Innovation Solution
An electrostatic detector with sensor electrodes, a shield electrode, and interconnects of varying resistance values, coupled with a determination unit to identify abnormalities based on electrostatic capacitances, allowing for precise detection of interconnect issues.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional electrostatic capacitance detection is used, then detection of interconnect abnormalities can be performed, but the specific location of the abnormality cannot be identified
Solution Approach 1:
Each second interconnect is assigned a unique resistance value, creating local differentiation in the system. This allows the determination unit to identify which specific interconnect has an abnormality by detecting changes in electrostatic capacitance that correspond to specific resistance values, thereby preserving location information while maintaining detection accuracy.
2Loss of information
If multiple interconnects with different resistance values are used, then specific interconnect abnormalities can be identified, but device complexity increases
Solution Approach 1:
The patent changes the resistance parameter of each second interconnect to a different value. This parameter differentiation enables the determination unit to distinguish between abnormalities in different interconnects by analyzing electrostatic capacitance changes in response to the AC signal, achieving location identification without requiring complex additional structures.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate identification of interconnect abnormalities, enhancing detection accuracy and reliability by distinguishing between normal and abnormal states through varying resistance values.
Implementation Method 1
a shield electrode coupled to the plurality of sensor electrodes
Implementation Method 2
a signal output unit configured to output an AC signal
Data Source
AI summary
An electrostatic detector includes a plurality of sensor electrodes, a shield electrode coupled to the plurality of sensor electrodes, a signal output unit configured to output an AC signal, a plurality of first interconnects coupled to the plurality of sensor electrodes, respectively, a plurality of second interconnects configured to couple the shield electrode to the signal output unit and supply the AC signal to the shield electrode, the plurality of second interconnects having mutually different resistance values between the shield electrode and the signal output unit, and a determination unit coupled to the plurality of sensor electrodes via the plurality of first interconnects and configured to determine whether or not an abnormality is generated in a second interconnect of the plurality of second interconnects based on electrostatic capacitances of the plurality of sensor electrodes.


