Electrostatic Actuator Sliding Displacement for Low-Profile Bistable Design
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Solution Overview
Problem
The existing electrostatic relays with bistable structures require significant space for seesaw motion, leading to increased height and precise positioning challenges, which complicates manufacturing and increases production time.
Innovation Solution
An actuator with a comb-teeth electrode configuration and electrets that allows for sliding displacement in a plane, utilizing an electrostatic actuation mechanism with multiple stable positions, where the electrostatic force matches with elastic forces, enabling controlled movement between these positions without continuous voltage application.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If the movable plate is configured to seesaw, then the electrostatic relay can achieve bistable structure, but it requires a space sufficient for allowing seesaw motion in the direction of height, which increases the size in height
Solution Approach 1:
The patent transitions from a vertical seesaw motion (one-dimensional height displacement) to a horizontal sliding motion between comb teeth (two-dimensional planar displacement). The movable electrode slides horizontally along the stationary comb teeth electrodes, maintaining bistability while eliminating the need for vertical space, thus resolving the contradiction between achieving bistable structure and reducing height.
2Stability of the object's composition
If the movable side base is connected to and sandwiched by the upper and lower stationary side bases, then the structure can be stabilized, but it requires precise positioning and increases man-hour
Solution Approach 1:
The patent divides the electrode structure into segmented comb teeth that interdigitate with each other. The stationary comb teeth and movable comb teeth are separate segments that slide relative to each other, eliminating the need for complex sandwiching connections between bases. This segmentation simplifies the assembly process, reduces positioning precision requirements, and maintains structural stability through the interlocking comb tooth design.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design results in a power-saving, low-profile actuator suitable for applications like shutter devices, fluid control, high-frequency switches, and two-dimensional scanning sensors, reducing size and manufacturing complexity.
Implementation Method 1
an electrostatic force generated by the electret matches with an elastic force exerted by the first elastic support part
Implementation Method 2
an electrostatic force generated by the electret matches with an elastic force exerted by the first elastic support part
Data Source
AI summary
An actuator includes: an electrostatic actuation mechanism including a stationary electrode and a movable electrode; a first movable part driven by the electrostatic actuation mechanism; a first elastic support part that elastically supports the first movable part; an electret formed in at least one of the stationary electrode and the movable electrode; and a drive control unit that controls application of voltage to the electrostatic actuation mechanism. In the actuator a plurality of stable states are set in which the first movable part is positioned at a stable position at which an electrostatic force generated by the electret matches with an elastic force exerted by the first elastic support part or at a stable position near such stable position. By applying a voltage to the electrostatic actuation mechanism, the first movable part may be displaced from any stable position to another stable position.