Electrostatic Substrate Holder with Exposed Connector Terminal

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Existing substrate transport apparatuses are unable to transport electrostatic chucks holding substrates due to their securement onto apparatuses like ion implanters, limiting the ability to move the substrates independently.

Innovation Solution

A substrate transport apparatus that utilizes electrostatic force to hold substrates, featuring a substrate holder with an externally exposed connector terminal for power supply, allowing for the transportation of substrates while maintaining electrostatic adhesion, and includes a placement section with power supply terminals to ensure continuous power to the holders.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If electrostatic chuck is secured onto apparatus like ion implanter, then substrate can be held by electrostatic force, but substrate holder cannot be transported out of apparatus

Engineering Contradiction:

Improvesubstrate holding reliabilityVSAvoidtransportability of substrate holder

Core Design Contradiction:

ReliabilityVSAdaptability or versatility

Solution Approach 1:

The substrate holder is divided into two independent parts: the holder body that maintains electrostatic adhesion to the substrate, and the connector terminal that can be detached from the power supply. This segmentation allows the holder body to remain secured to the substrate while the connector can be disconnected for transport purposes.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The connector terminal is extracted as a separable component from the holder body, allowing it to be detached from the power supply terminal. This extraction enables the substrate holder to be transported independently from the apparatus while maintaining electrostatic holding capability through the remaining holder body.

Inventive Principle:

Principle #2Taking out (Extraction)

2Adaptability or versatility

If substrate holder is transported while holding substrate by electrostatic force, then substrate can be moved independently, but power supply connection becomes problematic

Engineering Contradiction:

Improvetransportability of substrate holderVSAvoidpower supply connection complexity

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The power supply connection is designed to be dynamic rather than fixed. The connector terminal can be attached to the power supply terminal when power is needed and detached when transport is required. This dynamic connection simplifies the overall system by allowing the holder to operate independently during transport without requiring complex continuous power delivery mechanisms.

Inventive Principle:

Principle #15Dynamics

3Ease of manufacture

If connector terminal is externally exposed through holder body, then power supply connection is simplified, but holder structure becomes more complex

Engineering Contradiction:

Improveease of power supply connectionVSAvoidholder body structure

Core Design Contradiction:

Ease of manufactureVSDevice complexity

Solution Approach 1:

The connector terminal acts as an intermediary component that bridges the holder body and the power supply terminal. By positioning the connector externally on the holder body, it provides a convenient interface for power connection without requiring complex internal wiring or structural modifications to the holder body itself.

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables the reliable transportation and stacking of substrates using electrostatic force, preventing disengagement and misalignment, and allowing for efficient handling and bonding of substrates within the substrate bonding apparatus.

Implementation Method 1

a substrate holder for holding a substrate by means of electrostatic force generated by power supplied from an external source

Methodology Applied

Scientific EffectElectrostatic force: Electrostatics

Implementation Method 2

a connector terminal that is externally exposed through the holder body, where the connector terminal is attachable to and detachable from an external power supply terminal

Methodology Applied

Scientific EffectElectrical conduction: Conduction (electrical)

Data Source

PatentUS9240339B2Substrate holder, substrate holder unit, substrate transport apparatus, and substrate bonding apparatus

Publication Date: 2016.01.19 NIKON CORP

AI summary

A substrate holder is reliably transported in a state of holding a substrate. There is provided a substrate holder for holding a substrate by means of electrostatic force generated by power supplied from an external source. The substrate holder is to be transported in a state of holding the substrate. The substrate holder includes a holder body that is to have the substrate placed thereon, and a connector terminal that is externally exposed through the holder body, where the connector terminal is attachable to and detachable from an external power supply terminal. There is also provided a substrate transport apparatus for transporting a substrate holder holding a substrate by means of electrostatic force generated by power supplied from an external source. The substrate transport apparatus includes a placement section that has a placement surface on which the substrate holder is placed, where the placement section holds the substrate holder, and a power supply terminal that supplies power to the substrate holder placed on the placement surface.