Electrostatic Substrate Support to Prevent Display Surface Contamination
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Solution Overview
Problem
Conventional methods for manufacturing display devices often result in damage to the substrate and allow foreign substances to attach to the upper surface, compromising the reliability of the display devices.
Innovation Solution
The use of an apparatus with electrostatic chucks that contact the lower surface of the substrate, rather than the upper surface, to fix the substrate during manufacturing, along with pressure-sensitive chucks and elevating devices to minimize damage and prevent foreign substance attachment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the substrate is fixed to a chuck plate using conventional mechanical methods, then the substrate can be securely held during manufacturing, but the substrate may be damaged and foreign substances may attach to the upper surface
Solution Approach 1:
The patent replaces conventional mechanical fixing methods with electrostatic chuck technology. The electrostatic chuck uses electrostatic force generated by applying voltage to hold the substrate, eliminating the need for mechanical contact with the upper surface. This substitution prevents both substrate damage and foreign substance attachment while maintaining secure holding during manufacturing processes.
Solution Approach 2:
The patent introduces an electrostatic field as an intermediary between the chuck plate and the substrate. Instead of direct mechanical contact, the electrostatic field serves as the mediating force to hold the substrate in place. This intermediary approach allows secure fixing without physical contact that could cause damage or contamination.
2Reliability
If the substrate is fixed using electrostatic chucks contacting the lower surface, then substrate damage and foreign substance attachment are reduced, but the complexity of the apparatus increases
Solution Approach 1:
The electrostatic chuck plate serves multiple functions: it holds the substrate through electrostatic force, provides a flat support surface, and enables precise positioning. By consolidating these functions into a single component, the apparatus achieves reliable substrate holding without proportionally increasing complexity.
Solution Approach 2:
The patent changes the fundamental parameter of substrate fixation from mechanical contact force to electrostatic force. This parameter change enables non-contact holding that protects the substrate while the electrostatic chuck plate design optimizes the distribution of electrostatic force to maintain stability during manufacturing.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances the reliability and yield of display device manufacturing by reducing substrate damage and foreign substance attachment, ensuring a more stable and reliable manufacturing process.
Implementation Method 1
a plurality of electrostatic supports overlapping the plurality of openings and supported for reciprocal movement in respective ones of the openings
Data Source
AI summary
An apparatus for manufacturing a display device includes: a first housing having a first chamber; a support member disposed in the first chamber and including a frame having a plurality of openings; a plurality of adhesive patterns disposed on the frame; and a plurality of electrostatic supports overlapping the plurality of openings and supported for reciprocal movement in respective ones of the openings.