Electrostatic Particle Tool Charging Without Opening the Substrate Conveyor
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Solution Overview
Problem
Existing methods for charging particle-removing tools in semiconductor production apparatuses require opening the substrate conveyor, which introduces dust and particles into the system.
Innovation Solution
A charging system and method that includes a particle absorption tool, a charger, and a charger container with an opening facing the substrate conveyor, allowing the tool to be charged without opening the conveyor, using a charger accommodated in a place where FOUPs are located, and a robot arm to facilitate contact and charging.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the substrate conveyor is opened to manually charge the particle-removing tool, then the tool can be charged, but particles such as dust will enter the substrate conveyor
Solution Approach 1:
A charger container is introduced as an intermediary structure that houses the charger and provides a controlled charging environment. The container has an opening facing the substrate conveyor interior, allowing the robot arm to access the charger and retrieve the charged tool without requiring the substrate conveyor to be opened, thus preventing particle contamination while enabling charging operation
Solution Approach 2:
Manual charging operation is replaced by an automated system consisting of a robot arm that automatically retrieves the particle-removing tool from the charger container, places it on the substrate conveyor, and returns to retrieve the tool after charging. This mechanical automation eliminates the need for manual intervention and substrate conveyor opening
2Ease of operation
If the substrate conveyor is opened for charging, then the tool can be charged, but the operation time is lost and productivity decreases
Solution Approach 1:
The charger container is pre-positioned within the substrate conveyor interior, and the charger is pre-loaded with the particle-removing tool. The robot arm is pre-programmed to automatically retrieve and replace tools. This preliminary arrangement allows charging to occur without interrupting substrate conveyor operation, maintaining productivity
Solution Approach 2:
The charger container serves as an intermediary that enables charging operations to occur within the closed substrate conveyor environment. The opening in the container allows the robot arm to access the charger internally, eliminating the need to open the substrate conveyor and thus maintaining operational continuity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables charging of the particle absorption tool without exposing the substrate conveyor to dust, simplifying the process, reducing operator labor, and ensuring continuous operation with minimal control load and efficient particle absorption.
Implementation Method 1
a particle absorption tool configured to be electrostatically charged so as to build up a static electric charge for absorbing particles
Data Source
AI summary
A charging system according to this disclosure includes a particle absorption tool configured to be electrostatically charged so as to build up a static electric charge for absorbing particles; a charger configured to electrostatically charge the particle absorption tool so as to build up the static electric charge; and a charger container configured to accommodate the charger, arranged in a place where a FOUP for accommodating substrates is arranged, and having an opening that is opened toward an interior of a substrate conveyor.