Electrostatic Adsorption Tool with Water Repellent Layer
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Solution Overview
Problem
Conventional electrostatic chucks with sintered ceramic insulation layers struggle to maintain adsorption of thin objects in wet environments over long periods due to deteriorating holding power.
Innovation Solution
The electrostatic adsorption tool incorporates an electrostatic adsorption power generation member with an embedded electrode element group and a water repellent layer made of a fluorine material on the adsorption surface, which suppresses moisture adsorption and maintains adsorption power.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a sintered ceramic insulation layer is used as the adsorption surface, then the electrostatic chuck can maintain adsorption in dry environments, but in wet (high humidity) environments the holding power deteriorates over time and adsorption cannot be maintained
Solution Approach 1:
The patent applies composite materials by combining a water repellent material layer with an insulation layer. The water repellent material layer (made of fluororesin or similar) is formed on the adsorption surface of the insulation layer, creating a composite structure that prevents moisture adsorption while maintaining electrostatic adsorption functionality. This composite approach resolves the contradiction by providing both moisture resistance and reliable adsorption maintenance in wet environments.
Solution Approach 2:
The patent changes the surface properties of the adsorption surface by applying a water repellent coating that modifies the surface energy and hydrophobicity parameters. This parameter change prevents moisture adsorption on the insulation layer surface, thereby maintaining the electrostatic field integrity and adsorption holding power in high humidity environments over extended periods.
2Device complexity
If the electrostatic chuck operates in a wet environment without water repellent treatment, then the structure remains simple, but the holding power deteriorates after a long period of time
Solution Approach 1:
The patent applies preliminary action by pre-forming a water repellent material layer on the adsorption surface before the chuck begins operation in wet environments. This preliminary protective layer prevents moisture adsorption from occurring in the first place, thereby maintaining adsorption holding power throughout the operational duration without requiring complex structural modifications or active control mechanisms.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for sustained adsorption of thin objects in wet environments, enhancing processing capacity in steps like spin etching and reducing contamination and cleaning challenges.
Implementation Method 1
The electrostatic adsorption power generation member electrostatically adsorbs a thin object by applying voltage to the electrode element group
Implementation Method 2
a water repellent layer made of a water repellent material... which suppresses moisture adsorption and maintains adsorption power
Data Source
AI summary
An electrostatic adsorption tool includes an electrostatic adsorption power generation member in which an electrode element group is embedded. The electrostatic adsorption power generation member electrostatically adsorbs a thin object by applying voltage to the electrode element group. The electrostatic adsorption power generation member includes, at least on an adsorption surface that adsorbs the thin object, a first water repellent insulation layer made of a water repellent material.