Electrostatically Tunable Magnetoelectric Inductor Design
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Solution Overview
Problem
Current tunable RF inductors face limitations such as high power consumption, requirement of complex mechanical actuators, limited quality factors, and inconvenient usage, which restrict their widespread acceptance and application in RF circuits.
Innovation Solution
An electrostatically tunable inductor with a magnetoelectric structure comprising a piezoelectric layer and conductive metal layers, where the inductance is tuned by an electric field without the need for mechanical actuators or continuous current, utilizing semiconductor manufacturing techniques for integration into semiconductor devices.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If magnetic field tuning is used to adjust permeability, then inductance tunability is achieved, but power consumption increases significantly and constant current is required
Solution Approach 1:
The patent replaces magnetic field-based tuning with electric field-based tuning through piezoelectric actuation. Instead of using magnetic fields to change permeability, the invention uses piezoelectric materials that convert electric voltage into mechanical stress, which then modulates the magnetic properties of the core material. This substitution eliminates the need for continuous current flow and significant power consumption associated with magnetic field generation.
Solution Approach 2:
The invention changes the control parameter from magnetic field strength to electric voltage. By applying voltage to the piezoelectric material, mechanical stress is induced in the magnetic core, which changes its permeability and thus the inductance. This parameter change allows tuning without the continuous power consumption required by magnetic field-based methods.
2Adaptability or versatility
If mechanical actuators are used for tuning, then inductance adjustment is achieved, but device complexity increases and fabrication becomes difficult
Solution Approach 1:
The patent replaces complex mechanical actuators with a piezoelectric layer that can be directly integrated into the inductor structure. The piezoelectric material converts electrical signals directly into mechanical deformation of the magnetic core, eliminating the need for separate mechanical actuation mechanisms. This integration dramatically reduces device complexity and facilitates standard semiconductor fabrication processes.
Solution Approach 2:
The invention merges the tuning function into the inductor structure itself by integrating the piezoelectric layer directly with the magnetic core. Rather than using separate mechanical actuators, the piezoelectric material becomes an intrinsic part of the inductor assembly, allowing tuning to be achieved through electrical control without additional mechanical components.
3Adaptability or versatility
If varactor-based tuning is used, then inductance adjustment is achieved, but quality factor decreases and tunability is limited
Solution Approach 1:
The invention changes the tuning mechanism from electrical resistance modulation (varactor-based) to mechanical stress modulation (piezoelectric-based). By applying voltage to the piezoelectric material, mechanical stress is induced in the magnetic core, which changes its permeability and thus the inductance. This approach achieves wide tunability while maintaining high quality factors because it does not introduce the resistive losses inherent in varactor-based methods.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The electrostatically tunable inductor achieves a wide range of tunability (>5:1) with low power consumption (<0.5 mJ) and enhanced quality factors, eliminating the need for complex mechanical components and continuous current, thereby improving performance and integration into semiconductor devices.
Implementation Method 1
An electrostatically tunable inductor with a wide range of tunable inductance that does not require complex mechanical actuators or switches and does not require significant consumption of power or an ongoing constant current draw is described. In one or more embodiments, the electrostatically tunable inductor comprises a piezoelectric layer disposed above a substrate.
Implementation Method 2
Disposed above the piezoelectric layer is a magnetoelectric structure, comprising a first electrically conductive layer, a magnetic film layer adjacent to the first electrically conductive layer, and a second electrically conductive layer electrically connected to the first electrically conductive layer.
Data Source
AI summary
A method of manufacturing an electrostatically tunable magnetoelectric inductor, the method includes forming a piezoelectric layer on a substrate. The method further includes forming a magnetoelectric structure over the piezoelectric layer by: forming a first electrically conductive layer disposed above the piezoelectric layer; forming an isolation layer configured to translate changes in strain; forming a magnetic film layer disposed over the isolation layer; and forming a second electrically conductive layer, disposed over the magnetic film layer and wherein the second electrically conductive layer is in electrical communication with the first electrically conductive layer so as to form at least one electrically conductive coil around the magnetic film layer.