Integrated Electrostatic Voltmeter and Charge Adjustment Circuit
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Solution Overview
Problem
Current workpiece processing technologies lack effective monitoring and control of electrostatic charges, as electrostatic voltmeters are typically high impedance devices that do not allow for charge adjustment, leading to inadequate management of electrostatic charges during processing.
Innovation Solution
An apparatus and system that integrate an electrostatic voltmeter and a charge-adjustment circuit via a single conductor, controlled by a switch and a controller, enabling both monitoring and adjustment of electrostatic charges on a workpiece, allowing for precise control and measurement of voltage levels.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If an electrostatic voltmeter is used to measure voltage on a workpiece, then voltage measurement is achieved, but charge adjustment capability is lost
Solution Approach 1:
The system integrates both measurement and charge adjustment functions into a single unified device. The electrostatic voltmeter incorporates a charge-adjustment circuit that can both measure voltage on the workpiece and adjust its charge level, eliminating the need for separate measurement and adjustment equipment. This multi-functional design resolves the contradiction by providing both voltage measurement precision and charge adjustment capability within one system.
2Measurement precision
If separate measurement and discharge devices are used, then measurement accuracy is maintained, but device complexity increases
Solution Approach 1:
The patent combines the electrostatic voltmeter and charge-adjustment circuit into a single integrated device that connects to the workpiece through a single conductor. This merging of previously separate devices simplifies the system configuration while maintaining both measurement accuracy and charge adjustment capability, directly addressing the contradiction between measurement precision and device complexity.
3Reliability
If a high impedance voltmeter is used, then charge disturbance is minimized, but control capability is reduced
Solution Approach 1:
The system dynamically switches between high-impedance measurement mode and charge adjustment mode. During measurement, the high impedance protects the workpiece charge from disturbance. When adjustment is needed, the system activates the charge-adjustment circuit to modify the workpiece charge. This dynamic operation allows the system to maintain both measurement reliability and operational control capability at different times.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution provides enhanced visibility and control over electrostatic charges, minimizing electrical disruptions and optimizing workpiece processing by allowing for both discharge and charging operations, thereby improving processing outcomes.
Implementation Method 1
an electrostatic voltmeter and a charge-adjustment circuit are coupled to a same conductor via a switch... open the switch to monitor a voltage of the workpiece with the electrostatic voltmeter
Implementation Method 2
close the switch to adjust a level of charge in the workpiece with the charge-adjustment circuit
Data Source
AI summary
An apparatus, system, and method for managing an electrostatic charge of a workpiece are disclosed. The method comprises coupling an electrostatic voltmeter to a conductor, coupling a charge-adjustment system to the conductor, and coupling the conductor to the workpiece. A level of charge in the workpiece is adjusted, via the conductor, with the charge-adjustment circuit and a voltage of the workpiece is monitored, via the conductor, with the electrostatic voltmeter. A controller may be used to adjust the charge on the workpiece based upon the monitored voltage.