Element Manufacturing Method for Crystal Vibrators
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Solution Overview
Problem
Variations in substrate thickness lead to uneven characteristics in elements, such as crystal vibrators, due to in-plane thickness distribution, requiring adjustments in electrode shape and sorting of substrate pieces to maintain consistency.
Innovation Solution
A method involving film-thickness distribution acquisition, processing amount calculation, local processing to achieve desired thickness, electrode formation, and singulation to produce elements with uniform thickness, eliminating the need for individual design and sorting of elements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If substrate thickness is controlled uniformly, then element characteristics become consistent, but manufacturing complexity increases due to need for sorting and individual adjustment
Solution Approach 1:
The patent applies preliminary action by performing thickness adjustment on the substrate before electrode formation. The substrate thickness is corrected in advance to within a predetermined range, eliminating the need for subsequent sorting and individual adjustment of substrate pieces. This preliminary thickness uniformity ensures consistent element characteristics without adding manufacturing complexity.
Solution Approach 2:
The patent extracts the thickness adjustment step as a separate preliminary process before electrode formation. By removing substrates with thickness outside the predetermined range through adjustment before electrode deposition, the need for complex post-processing sorting and individual electrode design is eliminated, simplifying the overall manufacturing process.
2Ease of manufacture
If substrate thickness varies, then manufacturing is simpler, but element characteristics become uneven requiring sorting and adjustment
Solution Approach 1:
The patent performs thickness adjustment as a preliminary step before electrode formation, ensuring substrate thickness is within the predetermined range in advance. This preliminary action maintains manufacturing simplicity while guaranteeing consistent element characteristics, as electrodes are formed on uniformly thick substrates without requiring subsequent sorting or adjustment.
3Reliability
If individual electrode design is performed for each substrate piece, then characteristic consistency is achieved, but productivity decreases
Solution Approach 1:
The patent establishes thickness uniformity as a preliminary condition before electrode formation by adjusting all substrates to within a predetermined thickness range. This preliminary thickness control enables subsequent batch electrode formation without individual design or adjustment, maintaining characteristic consistency while significantly improving manufacturing efficiency and productivity.
Data Source
AI summary
An element manufacturing method includes a first step of obtaining a thickness distribution in a planar direction of a workpiece, a second step of calculating a processing amount distribution from a difference between the thickness distribution and a desired film-thickness distribution, a third step of locally processing the workpiece in accordance with the processing amount distribution, a fourth step of, after the third step, dividing an inside of a plane of the workpiece into a plurality of element parts and forming an electrode in each of the element parts, and a fifth step of making the plurality of element parts apart from each other to form a plurality of elements.


