Elevator Linear Motor Drive Magnetic Conduit Redirection
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Solution Overview
Problem
Current substrate processing systems face challenges in minimizing processing time for non-value added activities, preventing turbulence during substrate movement, and simplifying the process of moving substrates between multiple levels in a stackable system, particularly due to the need for precise handling and the risk of substrates being dislodged from carriers.
Innovation Solution
The implementation of a magnetic conduit configuration that redirects magnetic forces from a linear motor, allowing the motor to be positioned outside the system, and using magnetic conduits and pole pieces to create a stable and efficient magnetic coupling for substrate carrier movement between processing chambers and elevator systems, reducing mechanical parts and minimizing shear forces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If the linear motor is positioned inside the processing chamber to directly drive the substrate carrier, then the response time and acceleration are improved, but the motor interferes with the movement of the elevator and increases device complexity
Solution Approach 1:
The linear motor is extracted from the processing chamber and repositioned on the exterior wall. Magnetic conduits (pole pieces) are installed on the chamber wall to transmit magnetic forces from the external motor to the substrate carrier, eliminating motor interference with elevator movement while maintaining direct-drive performance
Solution Approach 2:
Magnetic conduits (pole pieces) serve as intermediaries to transmit magnetic forces from the external linear motor through the chamber wall to the substrate carrier. This mediator enables force transmission without direct motor-chamber contact, resolving the conflict between motor positioning and elevator operation
2Productivity
If the substrate carrier moves quickly to improve processing speed, then productivity increases, but turbulence occurs that may knock the substrate off the carrier
Solution Approach 1:
The magnetic force application is made dynamic and controllable, allowing the system to accelerate the substrate carrier quickly when needed while applying stabilizing magnetic forces to prevent substrate dislodgment during rapid movements
Solution Approach 2:
Magnetic conduits provide controlled magnetic coupling between the motor and carrier, enabling force transmission that can be modulated to achieve both rapid acceleration and stable substrate retention during high-speed operation
3Reliability
If mechanical coupling mechanisms are used to move the substrate carrier between chambers, then the connection is secure, but the mechanical parts increase device complexity and reduce reliability
Solution Approach 1:
The patent replaces mechanical coupling mechanisms with magnetic coupling through linear motors and magnetic conduits. This substitution eliminates mechanical wear and complex mechanical parts while providing secure, reliable connection and movement of the substrate carrier between chambers
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables faster, secure, and stable movement of substrate carriers between levels, reducing the risk of substrate dislodgment and allowing for improved processing speed while maintaining a reduced footprint and minimizing turbulence, thus enhancing overall processing efficiency.
Implementation Method 1
a linear motor positioned outside the elevator chamber, wherein the linear motor generates a magnetic motive force
Implementation Method 2
magnetic conduits transmit the magnetic force from the linear motor to the carrier to create magnetic coupling to transport the carrier
Implementation Method 3
magnetic conduits positioned between the linear motor and the carrier, wherein the magnetic conduit transmits the magnetic force from the linear motor to the carrier
Implementation Method 4
a plurality of pole pieces attached to the elevator base and coupling the magnetic field from the linear motor to the magnetic elements
Data Source
AI summary
Disclosed is a substrate processing system with a magnetic conduit configuration to improve the movement of a substrate carrier within the system. The configuration specifically provides for safe, secure movement of a carrier between multiple levels of a substrate processing system by using magnetic conduits to redirect magnetic forces created by a linear motor, permitting the linear motor to be positioned outside of the system and in a location that will not interfere with the movement of the carrier.