Ellipsoidal Light Source Device Laser Beam Entry
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Solution Overview
Problem
Existing light source devices for semiconductor and liquid crystal substrate manufacturing face inefficiencies in ultraviolet radiation utilization due to design flaws, such as non-optimized light paths and potential damage from direct laser exposure to treated articles.
Innovation Solution
A light source device featuring an ellipsoidal reflector with a discharge vessel at its focal point, a laser beam introduced through a window in a region not irradiated by reflected light, and a planar mirror to redirect the reflected light efficiently, ensuring the laser beam does not directly impact the treatment surface and optimizing light utilization.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Illumination intensity
If the input power into the high-pressure discharge lamp is increased to achieve greater ultraviolet light emission intensity, then the ultraviolet light emission intensity is improved, but the load on the electrodes is increased causing the high-pressure discharge lamp to be blackened due to materials evaporating from the electrodes so that a short lifespan results
Solution Approach 1:
The invention extracts and removes the electrodes from the discharge lamp, creating an electrodeless discharge lamp. This eliminates the electrode material evaporation problem that causes blackening and short lifespan, while still allowing high power input to generate intense ultraviolet light emission through microwave or radio frequency excitation of the discharge gas.
Solution Approach 2:
The invention replaces the traditional electrical contact system (electrodes) with a field-based excitation system using microwaves or radio frequencies. The electromagnetic field directly excites the discharge gas without mechanical or electrical contact, eliminating wear and material evaporation while maintaining high energy input capability.
2Ease of operation
If light entrance holes and light exit holes are provided in the side surface of the ellipsoidal reflector for laser beam entry, then the laser beam can enter the discharge vessel, but because of the holes on the reflecting surface, the ultraviolet radiation cannot be efficiently utilized
Solution Approach 1:
The invention changes the dimension of laser beam entry by introducing the laser beam from the apex (top) of the ellipsoidal reflector rather than through holes in the side surface. This allows the reflector to maintain its continuous reflective surface for efficient ultraviolet radiation collection while still enabling laser beam entry through the opening at the apex where reflected light does not reach.
Solution Approach 2:
The invention uses the geometric properties of the ellipsoidal reflector as an intermediary to separate the laser beam entry path from the ultraviolet radiation reflection path. The apex opening serves as a mediator that allows laser entry without compromising the reflective surface integrity, directing laser beams along a path that does not interfere with ultraviolet light collection.
3Ease of operation
If the laser beam enters into the electrodeless discharge lamp from a direction intersecting the optical axis of the ellipsoidal reflector, then the laser beam can enter the discharge vessel, but the discharge extends in a lateral direction and the discharge occurs even in a region shifted from the focal point, causing the ultraviolet radiation to not be accurately reflected
Solution Approach 1:
The invention changes the entry direction of the laser beam from a lateral direction (intersecting the optical axis) to an axial direction (along the optical axis). By introducing the laser beam from the apex along the optical axis, the discharge is confined to the focal region, ensuring accurate ultraviolet radiation reflection while maintaining operational simplicity.
Solution Approach 2:
The invention concentrates the laser beam energy precisely at the focal point of the ellipsoidal reflector by introducing the beam along the optical axis. This creates a localized high-energy region that generates discharge only at the desired location, ensuring that ultraviolet radiation is emitted from the correct position for accurate reflection and utilization.
4Productivity
If the laser beam is radiated onto the irradiation surface along with the radiant light generated by the discharge, then the light source device can be operated, but the article to be treated on the irradiation surface is damaged due to this undesired effect by the laser beam
Solution Approach 1:
The invention segments the optical paths by using the planar mirror to redirect reflected ultraviolet light away from the irradiation surface while allowing the laser beam to continue along its original path. This separation ensures that only the desired radiant light from discharge reaches the treated article, eliminating harmful direct laser exposure while maintaining treatment efficiency.
Solution Approach 2:
The planar mirror serves as an intermediary that redirects the reflected ultraviolet radiation away from the irradiation surface. This mediator selectively directs different types of radiation (ultraviolet vs. laser) to different destinations, allowing useful ultraviolet light to reach the article while preventing harmful laser beams from causing damage.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables efficient utilization of radiant light by preventing direct laser exposure to the treatment surface and improving the capture ratio of ultraviolet radiation, thereby extending device lifespan and enhancing treatment efficiency.
Implementation Method 1
a laser beam generator for generating a laser beam; means for introducing the laser beam into the discharge vessel; and means for irradiating and exciting the emission substance with the laser beam for causing light to be emitted
Implementation Method 2
the light emitted from the discharge vessel is reflected by an ellipsoidal reflecting surface
Implementation Method 3
a planar mirror positioned to receive emitted light reflected by the ellipsoidal reflector and for changing the direction of the reflected light
Data Source
AI summary
A light source device that irradiates a discharge vessel with a laser beam to produce radiant light that is reflected by an ellipsoidal reflecting surface efficiently utilizes the light produced by directing the laser beam through an unirradiated region where reflected light from the ellipsoidal reflector is blocked by the discharge vessel, through an opening side of the ellipsoidal reflector to the discharge vessel. The discharge vessel has an emission substance enclosed inside which is excited by the laser beam and produces radiant light, is arranged at a focal point of the ellipsoidal reflector. A planar mirror, with which radiant light reflected by the ellipsoidal reflector is reflected in a different direction has a window in an unirradiated region where reflected light from the ellipsoidal reflector is blocked by the discharge vessel through which the laser beam passes to the discharge vessel.