Ellipsometer Beam Steering for Non-Planar Surface Measurement
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Solution Overview
Problem
Existing ellipsometer systems lack the capability to quickly and easily determine average ellipsometric parameters from two locations on a concave-shaped object, which is essential for monitoring manufacturing parameters of non-planar surfaces like tire rims.
Innovation Solution
A system comprising a source of polarized electromagnetic radiation, a beam steering assembly with top and bottom elements, and a polarization state detector, which directs the beam to interact with a planar or non-planar object at two offset locations, allowing for the computation of average ellipsometric parameters through double interaction and reflection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a conventional ellipsometer system is used to investigate non-planar shaped objects, then the system can measure optical and physical properties, but the system complexity and difficulty of operation increase significantly
Solution Approach 1:
The beam steering assembly is divided into multiple independent components including a first beam directing element, a second beam directing element, and a third beam directing element. Each element can be independently positioned and oriented to direct the beam to specific locations on the sample, allowing measurement of non-planar surfaces without requiring complex reconfiguration of the entire system.
Solution Approach 2:
The system employs dynamically adjustable beam directing elements that can be positioned and oriented to change the beam path in real-time. This dynamic capability allows the same system to measure both planar and non-planar surfaces by simply adjusting the orientation of the beam directing elements rather than changing the entire measurement setup.
2Adaptability or versatility
If multiple beam directing elements are added to enable measurement of non-planar surfaces, then measurement capability improves, but the device complexity increases
Solution Approach 1:
The beam steering assembly with its multiple beam directing elements serves multiple functions: it can direct the beam to different locations on the sample, adjust the angle of incidence, and accommodate both planar and non-planar surfaces. This multi-functionality is achieved within a single integrated assembly rather than requiring separate systems for different measurement scenarios.
Solution Approach 2:
The beam directing elements act as intermediaries between the fixed ellipsometer components and the variable sample surfaces. By positioning and orienting these intermediate elements, the system can adapt to different sample geometries without requiring changes to the core ellipsometer architecture, thereby maintaining ease of operation.
3Measurement precision
If the beam is directed to interact with multiple locations on the sample, then the accuracy of average ellipsometric parameters improves, but the measurement time increases
Solution Approach 1:
The system enables continuous measurement by directing the beam through multiple beam directing elements to sequentially interact with different locations on the sample surface. The beam path is continuously maintained through the sample rather than requiring interruption and repositioning, allowing rapid acquisition of data from multiple locations and computation of average ellipsometric parameters.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables rapid and accurate determination of average ellipsometric parameters, facilitating in-field monitoring of manufacturing tolerances on non-planar surfaces, such as tire rims, with reduced complexity and focused beam application.
Implementation Method 1
a source of, and a polarization state generator for providing a polarized incident beam of electromagnetic radiation
Implementation Method 2
a first beam directing element therewithin and is directed thereby to exit from said beam steering assembly through said first bottom opening... impinge on a first location of said reflective surface... From said first impingement location on said reflective surface... said beam is then reflected
Implementation Method 3
a polarization state detector... computing system capability for determining change in polarization state set by the polarization state generator of said beam as a result of the double interaction thereof with said planar or non-planar shaped object
Data Source
AI summary
A system for easily determining average ellipsometric parameters based on data obtained from two different locations on a planar or non-planar shaped object, along with its method of use.