Ellipsometer Coating Analysis on Curved Surfaces

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Solution Overview

Problem

Coatings on highly curved surfaces often exhibit significant thickness variations, leading to degradation of optical and mechanical characteristics in peripheral regions, as existing analysis methods like spectrophotometry are inadequate for accurately measuring these variations.

Innovation Solution

A coating analysis apparatus incorporating an ellipsometer and computer-aided software for precise measurement of polarized radiation components, allowing for accurate determination of thickness, optical properties, and material density across the curved surface, using a positioning mechanism to analyze specific sample portions on the component.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a coating is formed on a highly curved surface, then the coating provides desired optical and mechanical characteristics in the central region, but the coating thickness varies significantly in the peripheral region leading to degradation of characteristics

Engineering Contradiction:
Improvecoating thickness uniformityVSAvoidoptical and mechanical characteristics
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The coating analysis is divided into multiple measurement locations (central region and peripheral region) to independently evaluate thickness and characteristics at different zones. This segmentation allows identification of specific problem areas and enables targeted corrections to achieve uniform thickness and reliable characteristics across the entire curved surface.

Inventive Principle:
Principle #1Segmentation

2Measurement precision

If existing spectrophotometer methods are used to analyze the coating, then the analysis can be performed, but the methods are inadequate for accurately measuring thickness variations on curved surfaces

Engineering Contradiction:
Improvethickness measurement accuracyVSAvoidcoating thickness variation
Core Design Contradiction:
Measurement precisionVSDifficulty of detecting and measuring

Solution Approach 1:

A transparent index-matched fluid is introduced as an intermediary medium between the curved surface and the measurement system. This fluid fills the gaps and creates a planar interface that allows accurate optical measurement of coating thickness variations on curved surfaces, enabling precise detection of thickness changes that would otherwise be difficult to measure.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Adaptability or versatility

If multiple layers of different materials are used in the coating, then the desired optical and mechanical characteristics are achieved, but different layers have different degrees of thickness variation making it difficult to ensure uniformity

Engineering Contradiction:
Improveoptical and mechanical characteristicsVSAvoidlayer thickness uniformity
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The measurement system provides feedback information about the actual thickness of each layer at different locations on the curved surface. This feedback enables identification of which layers have the most significant thickness variations, allowing for targeted adjustments in the coating process to achieve uniform thickness across all layers while maintaining the desired optical and mechanical characteristics.

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables accurate measurement and optimization of coating characteristics, improving the optical and mechanical performance by identifying and addressing thickness variations, thereby enhancing the coating's operational range and reliability.

Implementation Method 1

an ellipsometer and computer-aided software for precise measurement of polarized radiation components

Methodology Applied
Scientific EffectPolarization: Polarisation

Implementation Method 2

measure transmissivity and/or reflectance of the coating

Methodology Applied
Scientific EffectReflection: Reflection

Data Source

PatentUS7800756B2Method and apparatus for analyzing coatings on curved surfaces
Publication Date: 2010.09.21 RAYTHEON CANADA LTD
  • US7800756B2 patent drawing
  • US7800756B2 patent drawing
  • US7800756B2 patent drawing

AI summary

An ellipsometer is used to analyze each of a plurality of sample portions that each include a substrate portion with a coating portion thereon, the substrate portions corresponding to respective spaced portions of a part with a curved surface. For each sample portion, the analysis includes: directing onto the coating portion a beam of radiation that includes first and second components with different polarizations; detecting energy of each of the first and second components reflected by the sample portion; and generating data that includes, for each of a plurality of different wavelengths, information regarding a change caused by the sample portion to a relationship between the first and second components.