Ellipsometer Fluid Cell with Bubble Traps
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Solution Overview
Problem
Existing small fluid cells for investigating samples with electromagnetic radiation lack effective means to manage bubbles formed during fluid entry, which can interfere with measurements.
Innovation Solution
A small internal volume cell design featuring laterally separated fluid entry and exit ports with bubble traps in the exit pathway, along with input and output apertures for electromagnetic radiation, allowing for bubble accumulation and minimizing their impact on measurements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If fluid entry ports are positioned at the lower extent of the cell, then fluid can enter the cell easily, but bubbles rise through the entered fluid and interfere with electromagnetic radiation measurements
Solution Approach 1:
The patent extracts bubbles from the main fluid pathway by introducing separate bubble trap regions. These traps are positioned to receive bubbles that rise from the fluid entry port, isolating them from the electromagnetic radiation measurement path. The bubble traps act as dedicated removal zones that prevent bubbles from reaching the measurement area.
Solution Approach 2:
The patent introduces bubble trap regions as intermediary zones between the fluid entry port and the electromagnetic radiation measurement path. These intermediate regions serve as buffer zones where bubbles can accumulate and be removed without interfering with the main measurement function. The bubble traps mediate between fluid entry and measurement, preventing direct interference.
2Quantity of substance
If the cell internal volume is reduced to minimize fluid consumption, then less fluid is needed, but bubble management becomes more critical and difficult
Solution Approach 1:
The patent segments the cell internal volume into distinct functional regions: a main measurement chamber for electromagnetic radiation interaction and separate bubble trap regions for bubble accumulation. This segmentation allows the small overall volume to be efficiently utilized while providing dedicated spaces for bubble management without requiring additional external components.
Solution Approach 2:
The patent nests bubble trap regions within the overall cell structure, integrating them into the cell's internal volume. The bubble traps are positioned as recesses or side chambers within the main cell body, effectively utilizing the available space. This nesting approach provides bubble management functionality without increasing the external dimensions or fluid volume requirements.
3Object-affected harmful factors
If bubble traps are added to the cell design, then bubble interference is reduced, but the device complexity increases
Solution Approach 1:
The patent merges the bubble trap regions with the main cell structure, creating an integrated design where bubble management is built into the cell's fundamental architecture. The bubble traps share walls and boundaries with the main measurement chamber, eliminating the need for separate external bubble removal devices. This merging reduces overall system complexity while maintaining effective bubble management.
Solution Approach 2:
The patent designs the cell structure to serve multiple functions simultaneously: the same cell body contains both the electromagnetic radiation measurement chamber and the bubble trap regions. The cell walls and boundaries perform dual roles of containing measurement fluid and providing bubble accumulation spaces. This multi-functionality reduces the need for additional specialized components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The cell effectively reduces bubble interference, enabling precise investigation of fluid samples with electromagnetic radiation by accumulating bubbles, thus improving measurement accuracy and reliability.
Implementation Method 1
The sample substrate can be selected to be of a composition so as to selectively secure thereto a component in a fluid presented thereto, to the exclusion of other components
Implementation Method 2
said small internal volume cell is characterized by the presence of at least one bubble accumulating trap region in a fluid exit pathway to said exit port, which bubble trap(s) serve to accumulate bubbles produced during the entry and exit of fluid
Implementation Method 3
a beam of electromagnetic radiation is caused to enter said input aperture, reflect from said sample substrate near the location at which said fluid is caused to contact said sample substrate, and exits said output aperture
Data Source
AI summary
An ellipsometer system comprising a small internal volume cell having fluid entry, and exit ports wherein bubble traps are present in a bifurcated fluid pathway continuous with the fluid exit port. There further being present input and output apertures, for entering and exiting electromagnetic radiation, positioned to allow causing a beam of electromagnetic radiation to impinge on a sample substrate at a location thereon at which, during use, fluid contacts; as well as methodology of its use.