Ellipsometer Viewfinder Using Aperture Plate Scattering
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Solution Overview
Problem
Existing systems for visual observation of sample surfaces under investigation using electromagnetic radiation struggle to maintain the intensity of the radiation beam for data detection while allowing visual positioning, especially when the beam is incident at an oblique angle, as they divert some radiation to a visualization device.
Innovation Solution
A system comprising a source of electromagnetic radiation, focusing means, a data detector, and a beam directing means in combination with a camera-display system, where ambient light or light emitting diodes are used to scatter light from an aperture plate, allowing visual positioning of the sample relative to the beam's interaction point, and the beam directing means is optionally removed to maximize data detector intensity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Illumination intensity
If a beam splitter is used to direct sample illuminating electromagnetic radiation into a visualization device, then visual observation capability is improved, but intensity of the sample investigating beam available to the data detector is reduced
Solution Approach 1:
The patent divides the optical path into two separate channels: one for sample illumination (using LED or ambient light through the aperture plate) and one for data detection (using the electromagnetic radiation beam). This segmentation allows each channel to operate independently without energy loss from beam splitting, resolving the contradiction between visualization capability and beam intensity.
Solution Approach 2:
The aperture plate with hole serves as an intermediary element that allows ambient light or LED illumination to pass through to the sample without interfering with the electromagnetic radiation beam path. This mediator enables visual observation while preserving the full intensity of the investigating beam for data detection.
2Measurement precision
If a camera is oriented along the path of the beam at oblique angle of incidence to show where the beam impinges, then visual positioning accuracy is improved, but device complexity increases
Solution Approach 1:
The system uses the sample's own scattered light from ambient or LED illumination to provide visual feedback on beam position. The camera simply needs to view the sample surface from any convenient angle, and the scattered light naturally indicates where the beam is impinging, eliminating the need for complex camera positioning along the beam path.
Solution Approach 2:
The patent utilizes the scattering of light from the sample surface, which creates visible brightness variations that indicate beam position. This optical feedback mechanism provides intuitive visual positioning information without requiring complex camera systems or specialized positioning arrangements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate visual positioning of the sample relative to the electromagnetic radiation beam without reducing the intensity of the radiation available to the data detector, allowing for effective sample characterization.
Implementation Method 1
a beam directing means-director for causing total internal reflection therewithin of electromagnetic radiation entered thereinto
Implementation Method 2
ambient light or light from the light emitting diodes (LED's) is/are applied to cause camera-display system detectable wavelength range light to scatter off the sample side of said aperture plate (P)
Implementation Method 3
a first focusing means (FL1)... a second focusing means (FL2)
Data Source
AI summary
A system for and method of allowing visual observation of a sample being subject to investigation by an electromagnetic beam, to identify where thereupon a beam of sample investigating electromagnetic radiation is caused to impinge, in combination with a data detector of the beam of sample investigating electromagnetic radiation after it interacts with the sample.