Elliptical Mirror Light Source Laser Guide Placement

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Solution Overview

Problem

Existing light sources for semiconductor and liquid crystal substrate manufacturing face challenges in efficiently utilizing ultraviolet light due to inefficient reflection and potential damage from direct laser light irradiation, leading to reduced process efficiency and lamp longevity.

Innovation Solution

A light source design featuring an elliptical reflection mirror with a discharge chamber at its focal point, utilizing a laser light guide positioned between the first and second focal points to direct laser light into the discharge chamber, preventing direct irradiation and enhancing light reflection efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Power

If laser light enters the discharge chamber through holes on the side surfaces of the elliptical reflection mirror, then the discharge can be generated, but the ultraviolet light cannot be efficiently utilized and the discharge is extended in a direction deviating from the focal point

Engineering Contradiction:

Improvedischarge generationVSAvoidultraviolet light utilization efficiency

Core Design Contradiction:

PowerVSLoss of energy

Solution Approach 1:

The laser light guide is extracted from the problematic side-surface hole configuration and repositioned to enter through the top opening of the elliptical reflection mirror, aligning with the optical axis to enable efficient ultraviolet light collection at the focal point

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The laser light guide acts as an intermediary component that mediates between the laser light source and the discharge chamber, directing the laser light along the optical axis through the top opening to achieve both discharge generation and efficient ultraviolet light utilization

Inventive Principle:

Principle #24Intermediary (Mediator)

2Power

If the laser light is irradiated directly onto the discharge chamber from the top opening, then the discharge can be generated, but the laser light passes through the discharge chamber and damages the surface of the object to be processed

Engineering Contradiction:

Improvedischarge generationVSAvoidlaser light damage to processed surface

Core Design Contradiction:

PowerVSObject-affected harmful factors

Solution Approach 1:

The harmful direct laser light path is extracted and replaced by introducing the laser light through the top opening along the optical axis, where it is reflected by the elliptical mirror to reach the discharge chamber without directly irradiating the processed surface

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The elliptical reflection mirror converts the potentially harmful direct laser light path into a beneficial reflected path, where the laser light activates the discharge chamber and the reflected ultraviolet light is efficiently collected at the focal point without damaging the processed surface

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

3Illumination intensity

If high input electric power is applied to the high-pressure discharge lamp, then larger ultraviolet radiation intensity can be obtained, but the load to the electrodes increases and substances evaporated from the electrodes cause the lamp to become dark and shorten its lifetime

Engineering Contradiction:

Improveultraviolet radiation intensityVSAvoidlamp lifetime

Core Design Contradiction:

Illumination intensityVSDuration of action of stationary object

Solution Approach 1:

The mechanical/electrical electrode system is replaced with a laser-induced discharge system, where laser light activates the discharge gas directly without requiring physical electrodes, thereby eliminating electrode evaporation and extending lamp lifetime while maintaining high ultraviolet radiation intensity

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration ensures efficient reflection and utilization of ultraviolet light, preventing damage to processed surfaces and extending lamp lifespan by directing laser light along the optical axis, thereby improving energy density and light capture ratios.

Implementation Method 1

a laser light generator which emits the laser light; and a laser light guide which guides the laser light from an opening side of the elliptical reflection mirror into the discharge chamber

Methodology Applied

Scientific EffectLaser: Laser

Implementation Method 2

an elliptical reflection mirror having first and second focal points; the luminescent substance is excited by providing the laser light to the luminescent substance so as to emit light, and the light is reflected by the elliptical reflection mirror

Methodology Applied

Scientific EffectReflection: Reflection

Data Source

PatentEP2202778B1Light source

Publication Date: 2017.03.29 USHIO INC

AI summary

A light source is provided. The light source includes: an elliptical reflection mirror (2) having first and second focal points; a discharge chamber (1) in which a luminescent substance is enclosed and which is disposed on the first focal point (F1); a laser light generator (4) which emits the laser light; and a laser light guide (3) which guides the laser light from an opening side of the elliptical reflection mirror (2) into the discharge chamber (1). The luminescent substance is excited by providing the laser light to the luminescent substance so as to emit light, and the light is reflected by the elliptical reflection mirror (2). The laser light guide is disposed in a shade area (L1-L2) in which the light reflected by the elliptical reflection mirror (2) is blocked by the discharge chamber (1).