Elliptical Reticle Container Structure for Secure Alignment
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Solution Overview
Problem
Conventional reticle containers are designed for rectangular reticles, making it difficult to accommodate and securely hold elliptical reticles, which are easier to manufacture and offer enhanced precision and production yield in EUV processes.
Innovation Solution
A container specifically designed for non-rectangular reticles, comprising a cover and base with reticle retainers and supports that define an elliptical space, ensuring secure holding and alignment of elliptical reticles through a combination of curved edges and a ring groove, providing effective airtightness and contamination prevention.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If conventional rectangular reticle containers are used, then the container structure is simple and easy to manufacture, but the container cannot securely hold elliptical reticles
Solution Approach 1:
The container is designed with an elliptical receiving space that matches the elliptical shape of the reticle, replacing the conventional rectangular structure. The compartment wall and reticle retainers are configured with curved surfaces that conform to the reticle's geometry, enabling secure contact and restraint along the entire perimeter of the elliptical reticle.
Solution Approach 2:
The reticle retainers are strategically positioned to contact specific regions of the elliptical reticle, with each retainer having a contact surface tailored to the local curvature of the reticle at that position. This ensures optimal contact and restraint force distribution across the reticle's perimeter.
2Ease of manufacture
If conventional rectangular reticle containers are used, then the manufacturing process is straightforward, but the reticle alignment precision is compromised
Solution Approach 1:
The elliptical receiving space and compartment wall are designed to match the reticle's elliptical geometry, providing natural alignment guidance. The curved surfaces guide the reticle into the correct orientation during insertion, ensuring precise alignment without requiring complex adjustment mechanisms.
Solution Approach 2:
The elliptical shape introduces geometric asymmetry that provides inherent orientation reference. The reticle's elliptical geometry with distinct major and minor axes, combined with the matching container geometry, creates a unique fit that prevents rotational misalignment and ensures correct positioning.
3Device complexity
If conventional rectangular containers are designed, then the device structure is simple, but the contamination protection is insufficient for elliptical reticles
Solution Approach 1:
The elliptical receiving space is designed to tightly conform to the reticle's elliptical shape, minimizing gaps and voids between the container walls and the reticle. This tight fit prevents contaminants from accessing the reticle surface, providing effective protection while maintaining a relatively simple single-piece container structure.
Data Source
AI summary
The invention discloses a container for a non-rectangular reticle, adapted for accommodating an elliptical reticle, and including a cover and a base which are configured to define an elliptical space when engaged with each other. The cover and the base have reticle retainers and reticle supports, respectively, which are configured to securely hold the elliptical reticle.