Elongated Bump Structures for Flip Chip Interconnects

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Conventional circular copper pillar bumps in flip chip technology face limitations due to increased size, mechanical stress, and electrical current density, which hinder device miniaturization and lead to issues like dielectric layer delamination and electromigration.

Innovation Solution

The use of elongated bump structures with a conductive pillar and under-bump metallurgy layer, which provide a tighter pitch and reduced mechanical stress, allowing for more reliable connections and improved thermal expansion matching.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If circular copper pillar bumps are used, then fixed stand-off is provided independent of bonding wire pitch, but significant size is added to the interconnect structure limiting pitch dimension

Engineering Contradiction:
Improvefixed stand-offVSAvoidinterconnect structure size
Core Design Contradiction:
Ease of operationVSArea of moving object

Solution Approach 1:

The patent changes the geometric parameters of the bump structure from circular to elongated rectangular shape. This parameter change allows the bump to provide fixed stand-off while occupying less area, specifically reducing the pitch dimension requirement and enabling tighter interconnect spacing in the package structure.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention transitions from a circular bump (isotropic in two dimensions) to an elongated rectangular bump (anisotropic in two dimensions). This dimensional reconfiguration allows the bump to extend primarily in one direction (providing stand-off) while being compact in the perpendicular direction (reducing pitch dimension), effectively utilizing dimensional orientation to resolve the contradiction.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Reliability

If circular copper pillar bumps are used, then connection is provided between chip and external circuitry, but mechanical stress is created due to mismatched thermal expansion

Engineering Contradiction:
Improveconnection reliabilityVSAvoidmechanical stress
Core Design Contradiction:
ReliabilityVSStress or pressure

Solution Approach 1:

The patent changes the geometric parameters of the bump structure from circular to elongated rectangular shape. This parameter change allows the bump to provide fixed stand-off while occupying less area, specifically reducing the pitch dimension requirement and enabling tighter interconnect spacing in the package structure.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention transitions from a circular bump (isotropic in two dimensions) to an elongated rectangular bump (anisotropic in two dimensions). This dimensional reconfiguration allows the bump to extend primarily in one direction (providing stand-off) while being compact in the perpendicular direction (reducing pitch dimension), effectively utilizing dimensional orientation to resolve the contradiction.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Reliability

If circular copper pillar bumps are used, then electrical connection is provided, but large electrical current density contributes to electromigration and electric stress

Engineering Contradiction:
Improveelectrical connectionVSAvoidelectromigration and electric stress
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent changes the geometric parameters of the bump structure from circular to elongated rectangular shape. This parameter change allows the bump to provide fixed stand-off while occupying less area, specifically reducing the pitch dimension requirement and enabling tighter interconnect spacing in the package structure.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention transitions from a circular bump (isotropic in two dimensions) to an elongated rectangular bump (anisotropic in two dimensions). This dimensional reconfiguration allows the bump to extend primarily in one direction (providing stand-off) while being compact in the perpendicular direction (reducing pitch dimension), effectively utilizing dimensional orientation to resolve the contradiction.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Data Source

PatentUS10784223B2Elongated bump structures in package structure
Publication Date: 2020.09.22 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US10784223B2 patent drawing
  • US10784223B2 patent drawing
  • US10784223B2 patent drawing

AI summary

A package structure includes a chip attached to a substrate. The chip includes a bump structure including a conductive pillar having a length (L) measured along a long axis of the conductive pillar and a width (W) measured along a short axis of the conductive pillar. The substrate includes a pad region and a mask layer overlying the pad region, wherein the mask layer has an opening exposing a portion of the pad region. The chip is attached to the substrate to form an interconnection between the conductive pillar and the pad region. The opening has a first dimension (d1) measured along the long axis and a second dimension (d2) measured along the short axis. In an embodiment, L is greater than d1, and W is less than d2.