Embedded 3D Package Antenna Structure for High-Frequency RF

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Solution Overview

Problem

Conventional antennas in integrated circuits face limitations in performance and capability due to size reduction, necessitating an improved integrated antenna structure for enhanced radio frequency (RF) transmission in modern semiconductor devices.

Innovation Solution

The integration of vertical Through Dielectric Via (TDV) walls and TDV gratings forms an antenna oscillation cavity, allowing for varied heights, widths, and spacings, enabling high-frequency lateral RF transmission suitable for 5G & 6G applications, and acting as embedded RF emission and receiving antenna structures, while being compatible with current manufacturing processes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If antenna size is reduced to meet integration requirements, then device integration is improved, but antenna performance deteriorates

Engineering Contradiction:
Improveantenna sizeVSAvoidantenna performance
Core Design Contradiction:
Volume of moving objectVSReliability

Solution Approach 1:

The patent transitions from planar 2D antenna structures to three-dimensional 3D antenna structures by forming vertical TDV walls and gratings that extend through multiple dielectric layers. This dimensional change allows the antenna to achieve resonant cavities in the vertical direction, improving RF performance while maintaining a compact footprint suitable for integrated circuits.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The antenna structure is nested within the IC package by embedding TDV walls and gratings inside the dielectric layers surrounding the semiconductor die. The conductive elements are positioned within cavities formed in the dielectric material, creating a nested configuration where the antenna is integrated within the existing package structure rather than occupying additional external space.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Ease of manufacture

If conventional planar antenna structures are used, then manufacturing is simpler, but RF transmission capability at high frequencies deteriorates

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoidRF transmission capability
Core Design Contradiction:
Ease of manufactureVSSpeed

Solution Approach 1:

The antenna structure is segmented into multiple discrete components including vertical TDV walls, TDV gratings, and conductive plates positioned at different heights and locations. These segmented elements work together to form resonant cavities that support high-frequency operation, while each individual element can be manufactured using standard semiconductor fabrication processes.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces vertical dimensionality to the antenna structure by forming TDV walls and gratings that extend through multiple dielectric layers in the thickness direction. This 3D configuration creates resonant cavities that enable high-frequency RF transmission, overcoming the limitations of conventional planar 2D antenna structures while remaining compatible with existing manufacturing processes.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Data Source

PatentUS12191265B2Antenna apparatus and method
Publication Date: 2025.01.07 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US12191265B2 patent drawing
  • US12191265B2 patent drawing
  • US12191265B2 patent drawing

AI summary

A package structure includes a first die, a second die over and electrically connected to the first die, an insulating material around the second die, a first antenna extending through the insulating material and electrically connected to the second die, the first antenna being adjacent to a first sidewall of the second die, wherein the first antenna includes a first conductive plate extending through the insulating material, and a plurality of first conductive pillars extending through the insulating material, wherein the first conductive plate is between the plurality of first conductive pillars and the first sidewall of the second die.