Embedded Deep Trench Capacitor Stack for Stable Package Power

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Solution Overview

Problem

High-power semiconductor dies require stable voltage and efficient power delivery, which is challenging due to the space and mechanical stability issues posed by traditional capacitor placement on circuit boards.

Innovation Solution

Embedding deep trench capacitors within the substrate core of a circuit board and using a spacer to stabilize the power components, allowing for efficient power delivery and mechanical support, while reducing the overall height and eliminating the need for additional filler material.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If capacitors are placed on the same package as the dies, then power delivery performance is improved, but device complexity and space usage increase

Engineering Contradiction:
Improvepower delivery performanceVSAvoidpackage complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent merges the capacitor with the substrate core by embedding it within the substrate's internal cavity, forming an integrated power delivery system. This combination eliminates the need for separate capacitor components on the package surface, reducing overall device complexity while maintaining improved power delivery performance through proximity to the die.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The capacitor is nested within the substrate core's internal cavity, utilizing the substrate's three-dimensional structure. This nesting approach allows the capacitor to be housed inside the existing substrate volume rather than adding external components, thereby improving power delivery without increasing package footprint or complexity.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Reliability

If deep trench capacitors are used, then voltage stability is improved, but manufacturing complexity increases

Engineering Contradiction:
Improvevoltage stabilityVSAvoidmanufacturing complexity
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The deep trench capacitor is segmented into discrete etched regions within the substrate, with individual trenches forming capacitor structures at specific locations. This segmentation allows the complex three-dimensional capacitor structure to be fabricated using standard semiconductor processing techniques, reducing manufacturing complexity while maintaining voltage stability performance.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent replaces traditional mechanical assembly of separate capacitor components with a monolithic semiconductor fabrication process. The deep trench capacitors are formed in-situ within the substrate using etching and deposition processes, eliminating complex mechanical assembly steps and reducing manufacturing complexity while achieving stable voltage performance.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Area of stationary object

If power components are embedded in substrate core, then real estate usage is reduced, but mechanical stability challenges arise

Engineering Contradiction:
Improvereal estate usageVSAvoidmechanical stability
Core Design Contradiction:
Area of stationary objectVSStability of the object's composition

Solution Approach 1:

The substrate core is designed with localized regions of different properties: the internal cavity provides space for the capacitor while the surrounding substrate material maintains structural integrity. This local quality differentiation allows embedding of power components without compromising overall mechanical stability, as the substrate's rigid structure supports the embedded capacitor.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent employs composite construction by integrating the capacitor with the substrate core to form a unified hybrid structure. This composite approach combines the electrical functionality of the capacitor with the mechanical strength of the substrate, achieving both reduced real estate usage and maintained mechanical stability through the synergistic integration of different materials and functions.

Inventive Principle:
Principle #40Composite materials

Data Source

PatentUS20250218904A1Technologies for power and spacer components embedded in a substrate core
Publication Date: 2025.07.03 INTEL CORP
  • US20250218904A1 patent drawing
  • US20250218904A1 patent drawing
  • US20250218904A1 patent drawing

AI summary

Technologies for components embedded in a substrate core are disclosed. In one embodiment, power components such as deep trench capacitors are disposed in a cavity defined in a substrate core for a circuit board of an integrated circuit package, such as a processor. A spacer may be included between the power components. The power components are stacked on top of each other, allowing for the stack of power components to match the height of the substrate core, even when the height of the individual power components is less than the height of the substrate core. Configuring the power components in this manner can provide mechanical stability to the power components and substrate core and provide power to a semiconductor die mounted on the circuit board.