Embedded Ferrite Inductors for Low-Profile Coreless Substrates

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Solution Overview

Problem

Current solutions for integrating inductors into electronic substrates, such as air core inductors and magnetic core inductors, face challenges in achieving high inductance density and low Z-height, especially in coreless substrates, while also avoiding issues like magnetic filler leaching in standard fabrication processes.

Innovation Solution

The use of high-permeability magnetic ferrite materials to form inductors within coreless electronic substrates, where the magnetic ferrite materials are processed to prevent leaching into plating and etching solutions, allowing for high inductance density and low-loss planar magnetic inductors.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If magnetic resins are used to form inductors in coreless substrates, then inductance density is improved, but magnetic fillers leach into plating and etching solutions causing process instability

Engineering Contradiction:
Improveinductance densityVSAvoidprocess stability
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

A barrier layer is introduced as an intermediary between the magnetic filler-containing layer and the plating/etching solutions. This barrier layer prevents direct contact and leaching of magnetic fillers into the chemistry, thereby maintaining process stability while allowing the magnetic inductor structure to function. The barrier layer acts as a mediator that isolates the harmful interaction between magnetic fillers and plating/etching chemistries.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The potential harm of magnetic filler leaching is converted into a benefit by using the leaching mechanism itself to form a protective barrier. The barrier layer is designed to be formed from or by the magnetic filler material, transforming the problematic leaching behavior into a useful protective function that prevents further leaching and maintains solution stability.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

2Quantity of substance

If conventional magnetic core inductors are used, then inductance density is improved, but Z-height increases making them unsuitable for coreless substrates

Engineering Contradiction:
Improveinductance densityVSAvoidZ-height
Core Design Contradiction:
Quantity of substanceVSLength of stationary object

Solution Approach 1:

The inductor structure is transitioned from a three-dimensional magnetic core architecture to a planar two-dimensional structure. By forming the magnetic inductor within the plane of the coreless substrate rather than extending vertically with a thick magnetic core, the design achieves high inductance density while maintaining low Z-height. This dimensional transformation allows the inductor to be integrated into thin-coreless substrate architectures.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

Thin film magnetic materials are used to create the inductor structure instead of bulky magnetic cores. The magnetic inductor is formed as a thin planar structure within the substrate layers, enabling high inductance density to be achieved without increasing the vertical thickness. This thin-film approach allows integration into coreless substrates with strict height constraints.

Inventive Principle:
Principle #30Flexible shells and thin films

3Ease of manufacture

If magnetic resins are formulated to suit standard fabrication processes, then process compatibility is improved, but magnetic properties deteriorate

Engineering Contradiction:
Improveprocess compatibilityVSAvoidmagnetic properties
Core Design Contradiction:
Ease of manufactureVSQuantity of substance

Solution Approach 1:

The magnetic inductor structure is segmented into distinct functional layers: a magnetic filler-containing layer that provides magnetic properties, a barrier layer that prevents leaching, and conductive trace layers that form the inductor coils. This segmentation allows each layer to be optimized independently - the magnetic filler layer maintains high magnetic properties while the barrier layer ensures process compatibility, avoiding the need to compromise magnetic properties for processability.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A composite structure is created combining magnetic fillers embedded in a dielectric matrix with an additional barrier layer. This composite approach allows the magnetic resin to maintain its magnetic properties while the barrier layer provides the necessary process compatibility. The composite structure separates the conflicting requirements of magnetic performance and fabrication process compatibility into different material components.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the fabrication of coreless substrates with integrated inductors that have high inductance density and low-loss characteristics without increasing the Z-height, and can be integrated into existing manufacturing processes without altering the chemistry or equipment.

Implementation Method 1

inductors are passive electrical components that store energy in a magnetic field generated by magnetic materials within the inductors

Methodology Applied
Scientific EffectMagnetic field generation: Magnetic Field

Implementation Method 2

high-permeability magnetic ferrite materials to form inductors

Methodology Applied
Scientific EffectFerromagnetism: Ferromagnetism

Implementation Method 3

inductors are passive electrical components that store energy in a magnetic field generated by magnetic materials within the inductors

Methodology Applied
Scientific EffectElectromagnetic induction: Electromagnetic Induction

Data Source

PatentUS12272484B2Coreless electronic substrates having embedded inductors
Publication Date: 2025.04.08 INTEL CORP
  • US12272484B2 patent drawing
  • US12272484B2 patent drawing
  • US12272484B2 patent drawing

AI summary

An inductor can be formed in a coreless electronic substrate from magnetic materials and/or fabrication processes that do not result in the magnetic materials leaching into plating and/or etching solutions/chemistries, and results in a unique inductor structure. This may be achieved by forming the inductors from magnetic ferrites. The formation of the electronic substrates may also include process sequences that prevent exposure of the magnetic ferrites to the plating and/or etching solutions/chemistries.