Embedded Off-Die Inductors for Low-Parasitic Chip Packaging

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Solution Overview

Problem

Conventional chip packaging schemes face challenges with reduced space for inductors due to increased IC density, leading to parasitic effects and diminished performance from surface-mounted inductors, which are susceptible to parasitic losses and require complex routings.

Innovation Solution

The integration of embedded off-die inductors in a redistribution layer and a substrate, such as a package substrate or interposer, where one inductor is disposed adjacent the IC die and another in the substrate, forming a series connection to enhance inductance and reduce parasitic effects.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If conventional surface mounted inductors are used, then space requirements are mitigated, but routing distances increase and performance diminishes

Engineering Contradiction:
Improveinductor spaceVSAvoidperformance
Core Design Contradiction:
Area of stationary objectVSReliability

Solution Approach 1:

The patent introduces an intermediary structure - the redistribution layer (RDL) - that serves as both a routing medium and an inductor substrate. The RDL is positioned between the IC die and package substrate, acting as a mediator that allows inductor placement close to the die while maintaining electrical connectivity through controlled routing paths within the RDL structure itself.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent transitions from surface-mounted inductors (2D placement on package substrate) to embedded inductors within the RDL (utilizing the vertical dimension between die and substrate). This dimensional shift allows inductors to be positioned in the Z-direction closer to the die, reducing routing distances while maintaining compact footprint.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Quantity of substance

If IC device density increases, then area utilization improves, but parasitic effects increase

Engineering Contradiction:
Improvedevice densityVSAvoidparasitic effects
Core Design Contradiction:
Quantity of substanceVSObject-generated harmful factors

Solution Approach 1:

The patent extracts the inductor function from the traditional package substrate location and relocates it to the RDL layer adjacent to the IC die. This separation removes the inductor from the high-density routing environment of the package substrate, thereby reducing exposure to parasitic effects from surrounding circuits and power grids while maintaining compact device density.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent creates a localized low-parasitic environment by placing inductors in the RDL layer specifically positioned near the IC die, where the electromagnetic environment is more controlled and isolated from the complex routing of the package substrate. This local quality improvement reduces parasitic coupling while maintaining overall high device density.

Inventive Principle:
Principle #3Local quality

3Power

If inductor area increases, then inductance improves, but valuable substrate core space is occupied

Engineering Contradiction:
ImproveinductanceVSAvoidsubstrate core space
Core Design Contradiction:
PowerVSArea of stationary object

Solution Approach 1:

The patent utilizes the vertical dimension by embedding inductors within the RDL layer structure rather than placing them on the package substrate surface. This allows inductors to occupy space in the Z-direction (between die and substrate) rather than consuming valuable substrate core area, enabling larger inductor footprints without reducing available substrate real estate.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent nests the inductor structures within the RDL layer, which itself is nested between the IC die and package substrate. This nested arrangement allows inductors to be housed within the existing package structure without requiring additional substrate core space, effectively utilizing the vertical stacking volume.

Inventive Principle:
Principle #7Nested doll (Nesting)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration allows for increased inductance and power efficiency, freeing up space within the IC die for additional components and improving signal path capacitance while reducing power consumption and assembly time.

Implementation Method 1

embedded off-die inductors coupled in series... one inductor embedded in a redistribution layer adjacent an integrated circuit die of the chip package and a second inductor embedded in a substrate of the chip package

Methodology Applied
Scientific EffectElectromagnetic Induction: Electromagnetic Induction

Data Source

PatentUS12604740B2Chip package with integrated embedded off-die inductors
Publication Date: 2026.04.14 XILINX INC
  • US12604740B2 patent drawing
  • US12604740B2 patent drawing
  • US12604740B2 patent drawing

AI summary

A chip package and method for fabricating the same are provided that includes embedded off-die inductors coupled in series. One of the off-die inductors is disposed in a redistribution layer formed on a bottom surface of an integrated circuit (IC) die. The other of the series connected off-die inductors is disposed in a substrate of the chip package. The substrate may be either an interposer or a package substrate.