Interposer Structure With Embedded Passives for Dense I/O Packaging

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Solution Overview

Problem

The increasing density of input/output (I/O) pads on integrated circuit dies due to smaller packaging sizes and more integrated functions poses challenges in die packaging, particularly in redistributing I/O pads to a larger area effectively.

Innovation Solution

The implementation of a system-on-wafer assembly that includes a wafer scale interposer with integrated passive devices and a redistribution structure, allowing for heterogeneous integration with short interconnects, symmetrical molding, and miniaturized voltage regulator modules, along with integrated fan-out packages and Pulse Width Modulation circuits, to enhance electrical performance and computing power.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the area available for I/O pads is decreased to accommodate smaller packaging sizes, then the packaging density is improved, but the number of I/O pads that can be effectively redistributed is reduced

Engineering Contradiction:
Improvepackaging densityVSAvoidnumber of I/O pads
Core Design Contradiction:
ProductivityVSQuantity of substance

Solution Approach 1:

The patent extends the redistribution of I/O pads from a two-dimensional surface layout to a three-dimensional structure by forming conductive vias that penetrate through the substrate. This allows I/O pads to be redistributed not only across the surface area but also through the vertical dimension, effectively increasing the total number of accessible I/O pads without increasing the packaging footprint.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent implements a nested structure where conductive vias are formed within the substrate, creating hierarchical levels of interconnection. The vias are nested within the substrate material, allowing multiple layers of I/O pad redistribution to be stacked vertically, thereby maximizing the use of available space and increasing packaging density while maintaining high I/O pad counts.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Adaptability or versatility

If the density of I/O pads is increased to accommodate more functions in smaller areas, then the functional integration is improved, but the difficulty of die packaging and I/O pad redistribution increases

Engineering Contradiction:
Improvefunctional integrationVSAvoiddifficulty of die packaging
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent introduces an intermediary substrate structure that mediates between the high-density I/O pads on the die and the external packaging environment. The substrate with its embedded conductive vias acts as an intermediate redistribution layer, simplifying the packaging process by providing pre-formed, organized interconnection paths that reduce the complexity of directly handling and routing high-density I/O pads.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent segments the I/O pad redistribution function into separate modular components: the die with high-density pads, the substrate with conductive vias, and the external packaging interface. This segmentation allows each component to be optimized independently and assembled systematically, reducing the overall complexity of die packaging while maintaining high functional integration.

Inventive Principle:
Principle #1Segmentation

Data Source

PatentUS12199051B2Integrated circuit structure and method
Publication Date: 2025.01.14 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US12199051B2 patent drawing
  • US12199051B2 patent drawing
  • US12199051B2 patent drawing

AI summary

A semiconductor device includes a first plurality of dies encapsulated by an encapsulant, an interposer over the first plurality of dies, an interconnect structure over and electrically connected to the interposer, and a plurality of conductive pads on a surface of the interconnect structure opposite the interposer. The interposer includes a plurality of embedded passive components. Each die of the first plurality of dies is electrically connected to the interposer. The interconnect structure includes a solenoid inductor in a metallization layer of the interconnect structure.