Embedded SRAM Macro Layout for Density-Current Tradeoffs

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Solution Overview

Problem

The electronics industry faces challenges in designing integrated circuits (ICs) that require both high-density and high-current memory cells to meet the demands of advanced cache memory requirements, while maintaining low power consumption and efficiency, as existing scaling methods increase manufacturing complexity.

Innovation Solution

The use of FinFET and gate-all-around (GAA) transistors in SRAM cells, with high-density memory cells employing narrower channel regions and high-current memory cells using wider channel widths, along with differential dopant concentrations and write-assist circuitry in high-density cells, to achieve improved stability, power efficiency, and operating speed.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If IC dimensions are reduced to improve production efficiency and lower costs, then manufacturing cost decreases, but manufacturing process complexity increases

Engineering Contradiction:
Improvemanufacturing costVSAvoidmanufacturing process complexity
Core Design Contradiction:
Ease of manufactureVSDevice complexity

Solution Approach 1:

The patent segments the SRAM cell into two distinct types: high-density memory cells with narrower channel regions and high-current memory cells with wider channel widths. This segmentation allows each cell type to be optimized independently for its specific function, enabling the IC to achieve both high density and high current capabilities without requiring further reduction of overall IC dimensions, thereby avoiding increased manufacturing process complexity

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent applies local quality by providing different channel widths at different locations within the SRAM cell structure. Specifically, the high-density cells have narrower channels in specific regions while high-current cells have wider channels in corresponding regions. This localized differentiation allows each region to have the precise geometric properties needed for its function, achieving both density and current performance without global scaling that would increase manufacturing complexity

Inventive Principle:
Principle #3Local quality

2Quantity of substance

If high-density memory cells are designed with narrower channel regions, then memory density increases, but write margin decreases

Engineering Contradiction:
Improvememory densityVSAvoidwrite margin
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

The patent segments the SRAM array into dedicated high-density memory cell regions and high-current memory cell regions. The high-density cells use narrower channel regions to maximize storage capacity, while the high-current cells use wider channel regions to provide sufficient write margin. This spatial segmentation resolves the contradiction by allowing each cell type to be optimized for its primary function without compromise

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent changes the channel width parameter differently for high-density versus high-current memory cells. High-density cells employ narrower channel widths (e.g., 10nm) to increase density, while high-current cells employ wider channel widths (e.g., 20nm) to improve write margin. This parameter differentiation allows both density and reliability requirements to be satisfied simultaneously through targeted optimization

Inventive Principle:
Principle #35Parameter changes

3Speed

If high-current memory cells use wider channel widths, then operating speed increases, but area occupied increases

Engineering Contradiction:
Improveoperating speedVSAvoidcell area
Core Design Contradiction:
SpeedVSArea of stationary object

Solution Approach 1:

The patent segments the SRAM macro into specialized high-current cell regions where wider channels provide high operating speed, and high-density cell regions where narrower channels provide compact footprint. This segmentation ensures that the area penalty for high-speed cells is confined to specific regions, while the majority of the array maintains high density

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent merges both high-density and high-current SRAM macros within a single IC device, allowing the system to leverage both cell types simultaneously. The high-current cells provide fast operation for critical paths, while the high-density cells provide compact storage for general purposes, achieving overall system optimization without requiring all cells to occupy maximum area

Inventive Principle:
Principle #5Merging (Combining)

Data Source

PatentUS12082389B2Integrated circuit with embedded high-density and high-current SRAM macros
Publication Date: 2024.09.03 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US12082389B2 patent drawing
  • US12082389B2 patent drawing
  • US12082389B2 patent drawing

AI summary

A semiconductor structure includes first and second SRAM cells disposed over a substrate. Each first SRAM cell includes at least two first p-type transistors and four first n-type transistors. Each first p-type and n-type transistors includes a channel in a single semiconductor fin. Each second SRAM cell includes at least two second p-type transistors and four second n-type transistors. Each second p-type transistors includes a channel in a single semiconductor fin. Each second n-type transistors includes a channel in multiple semiconductor fins. The source/drain regions of the first p-type transistors are doped at a first dopant concentration, the source/drain regions of the second p-type transistors are doped at a second dopant concentration, and the first dopant concentration is greater than the second dopant concentration.