Emissive Device Gas-Phase Deposition Mask Merging
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Solution Overview
Problem
The existing methods for producing full-color organic electroluminescent (EL) elements, such as the RGBW separate deposition method, require a large number of masks and evaporation steps, leading to increased production costs and prolonged processing times due to the need for multiple evaporation steps in reduced pressure environments.
Innovation Solution
A process involving a gas-phase deposition method using a minimal number of masks to form emissive layers, where the first and second emissive layers are deposited with specific masks to form the third emissive layer, allowing for the efficient production of emissive devices with reduced evaporation steps and masks, enabling the formation of four-color emissive layers, including blue, red, white, and green, with high color purity and intrinsic emission performance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the RGBW separate deposition method is used to form four-color emissive layers, then full-color emission is achieved, but the number of masks and evaporation steps increases significantly
Solution Approach 1:
The patent merges the formation of multiple emissive layers by using a single mask structure that defines openings for multiple colors (R, G, B, W) simultaneously. Instead of using separate masks for each color layer, one mask is used to pattern all four emissive layers in a single deposition process, thereby reducing the total number of masks from four to one and decreasing the number of evaporation steps while maintaining full-color emission capability
Solution Approach 2:
The mask structure is designed to serve multiple functions: it patterns red, green, blue, and white emissive layers simultaneously, and it enables the formation of both single-color and multi-color pixels within the same device. This universal mask design eliminates the need for multiple specialized masks, reducing complexity while maintaining versatility in displaying various colors
2Manufacturing precision
If multiple evaporation steps are performed in reduced pressure to form separate emissive layers, then color purity is maintained, but production time is prolonged
Solution Approach 1:
The patent implements continuous deposition of multiple emissive layers without breaking the vacuum environment. All four emissive layers (R, G, B, W) are deposited in sequence within the same reduced pressure environment without requiring intermediate venting or mask changes, thereby maintaining color purity through consistent deposition conditions while significantly reducing production time by eliminating repeated vacuum cycle interruptions
3Manufacturing precision
If four types of masks are used to form R, G, B, and W emissive layers separately, then precise patterning is achieved, but production cost increases due to mask expenses
Solution Approach 1:
The patent combines the patterning function of four separate masks into a single multi-opening mask structure. This single mask contains openings configured to pattern all four emissive layers (R, G, B, W) simultaneously, reducing mask-related costs while maintaining precise patterning through carefully designed opening geometries and positions that ensure accurate alignment and coverage for each color layer
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly reduces production costs and processing time while maintaining high reliability and color purity, enabling the efficient production of full-color emissive devices with fewer evaporation steps and masks, thereby improving yield and reducing defects.
Implementation Method 1
feeding the first material to a side adjacent to a first face of at least one first electrode by a gas-phase process with a first mask to form films
Implementation Method 2
The evaporation steps are performed in reduced pressure for a prolonged period of time
Data Source
AI summary
A process for producing an emissive device that includes (1) feeding the first material to the first region and the third region and to a side adjacent to a first face of at least one first electrode by a gas-phase process with a first mask to form films; (2) feeding the second material to the second region and the third region such that the second material fed in the third region is stacked above the first material in the third region and to the side adjacent to the first face of each first electrode by a gas-phase process to form the emissive layers; and (3) forming a second electrode at a side of each emissive layer opposite the side adjacent to the first electrode.


