Encapsulation of Sensing Device Using Demarcation Structure
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Solution Overview
Problem
Existing methods for encapsulating sensing and actuator devices often damage the fragile sensors during the material removal process, as they require post-processing techniques like plasma etching or laser cutting, and struggle with maintaining exposed sections while preventing analyte diffusion, leading to potential delamination and sensor failure.
Innovation Solution
The use of a demarcation structure that contacts the substrate and defines an enclosed area, allowing the encapsulation material to be cast outside this area, thereby leaving the sensor or actuator element uncovered without the need for post-processing techniques, and incorporating a capping structure that can be fabricated ex situ to ensure selective analyte access.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If post-processing material removal techniques (plasma etching, laser cutting) are used to expose sensor sections after encapsulation, then the sensor can be protected during encapsulation, but the fragile sensor is easily damaged during material removal
Solution Approach 1:
The patent applies preliminary action by creating the demarcation structure on the substrate before the encapsulation process begins. This pre-formed structure defines the enclosed area that will protect the sensor during encapsulation, eliminating the need for post-processing material removal and preventing sensor damage that would occur with techniques like plasma etching or laser cutting.
Solution Approach 2:
The patent segments the substrate surface into an enclosed area (containing the sensor) and an outer area by introducing a demarcation structure. This segmentation allows selective encapsulation where the encapsulation material is confined to the outer area while the sensor remains protected within the enclosed area, avoiding exposure to harmful removal processes.
2Reliability
If encapsulation material is conformally deposited around the entire device, then good encapsulation protection is achieved, but the sensor cannot be exposed to analyte for measurement
Solution Approach 1:
The patent applies local quality by creating a demarcation structure that defines a specific enclosed area on the substrate. This allows different regions to have different functions: the enclosed area maintains sensor exposure to analyte for measurement, while the outer area receives conformal encapsulation for protection. The encapsulation material is thus selectively applied only where protection is needed without compromising sensor accessibility.
3Adaptability or versatility
If a capping structure with semi-permeable membrane is added to filter analyte selectively, then selective analyte measurement is enabled, but delamination occurs due to swelling forces from water integration
Solution Approach 1:
The patent applies preliminary action by forming the demarcation structure on the substrate before adding the capping structure with semi-permeable membrane. This pre-formed structure provides a stable foundation that accommodates the membrane without direct contact between the swelling membrane and the substrate, preventing delamination while maintaining selective analyte measurement capability.
Solution Approach 2:
The demarcation structure acts as an intermediary element between the substrate and the capping structure with semi-permeable membrane. It provides mechanical support and isolation, preventing the swelling forces from the water-integrating membrane material from directly affecting the substrate and causing delamination, thus stabilizing the overall structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method reduces sensor damage during fabrication, allows for uniform or non-uniform encapsulation, and enables precise control over analyte access, improving the reliability and efficiency of the encapsulation process while maintaining sensor integrity.
Implementation Method 1
the encapsulation material (e.g. silicone rubber), in order to form a good encapsulation, presents a diffusion barrier for ions and other possible analytes
Implementation Method 2
Materials used to filter analyte must permit a specific diffusivity of liquid water
Implementation Method 3
cover the exposed sections with a capping structure, such as a semi-permeable membrane
Implementation Method 4
Materials used to filter analyte must permit a specific diffusivity of liquid water, meaning that they integrate water into their matrix
Data Source
AI summary
A method for encapsulating a sensing and/or actuator device, comprises the steps of providing a sensing and/or actuator device having a demarcation structure thereon. The sensing and/or actuator device comprises at least a substrate and a sensing and/or actuator element on the substrate. The demarcation structure contacts the substrate and defines an enclosed area of the substrate. The enclosed area comprises at least the sensing and/or actuator element. The method also comprises providing an encapsulation material outside the enclosed area, so the sensing and/or actuator element is left uncovered by the encapsulation material. The demarcation structure further comprises a capping structure overlaying the sensing and/or actuator element.


