Encoder Scale Manufacturing Using Passive State Member

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Solution Overview

Problem

The manufacturing of encoder scales using substrates that dissolve in etching liquids, such as untreated aluminum, leads to decreased patterning accuracy and yield rates due to dissolved material interfering with the etching process.

Innovation Solution

A manufacturing method involving a passive state member formed on a second surface of a metal substrate, which is then patterned on the first surface using an etching process, preventing substrate dissolution and maintaining accuracy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If a substrate made of untreated aluminum is used, then cost is reduced, but patterning accuracy decreases due to substrate dissolution in etching liquid

Engineering Contradiction:
Improvesubstrate material costVSAvoidpatterning accuracy
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

A passive state member (protective coating) is formed on the substrate surface before the etching process. This preliminary protective layer prevents the aluminum substrate from dissolving in the etching liquid, thereby maintaining patterning accuracy while allowing the use of cost-effective aluminum substrates.

Inventive Principle:
Principle #10Preliminary action

2Ease of manufacture

If a substrate made of untreated aluminum is used, then material cost is reduced, but yield rate decreases due to dissolved aluminum interfering with etching processing

Engineering Contradiction:
Improvesubstrate material costVSAvoidyield rate
Core Design Contradiction:
Ease of manufactureVSProductivity

Solution Approach 1:

The passive state member is applied in advance to prevent substrate dissolution during etching. This prevents aluminum particles from contaminating the etching liquid and interfering with the etching process, thereby maintaining high yield rates while using economical aluminum substrates.

Inventive Principle:
Principle #10Preliminary action

3Manufacturing precision

If a passive state member is formed on the substrate, then patterning accuracy is maintained, but manufacturing process complexity increases

Engineering Contradiction:
Improvepatterning accuracyVSAvoidmanufacturing process complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The passive state member serves as an intermediary protective layer between the aluminum substrate and the etching liquid. This intermediate layer prevents direct contact between the reactive etching liquid and the aluminum substrate, maintaining patterning accuracy while adding only a single straightforward coating step to the manufacturing process.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method enhances yield rates by preventing substrate dissolution and maintaining patterning accuracy, ensuring reliable encoder production.

Implementation Method 1

forming a passive state member on a second surface different from a first surface on which a pattern is formed in a substrate configured of a metal material

Methodology Applied
Scientific EffectPassivation: Oxidation

Implementation Method 2

an etching process which immerses the substrate into an etching solution, removes a portion of the pattern layer, and forms the pattern

Methodology Applied
Scientific EffectChemical etching: Chemical Bonding

Data Source

PatentUS10234308B2Encoder, manufacturing method of encoder scale, manufacturing method of encoder, and driving apparatus
Publication Date: 2019.03.19 NIKON CORP
  • US10234308B2 patent drawing
  • US10234308B2 patent drawing
  • US10234308B2 patent drawing

AI summary

An encoder includes a scale unit having a substrate configured of a metal material and in which a pattern is formed on a first surface of the substrate and a passive state member is formed on a second surface different from the first surface in the substrate, and a detection unit that is configured to move relative to the scale unit and detects the pattern.