End-block Rotary Bearing for Sputtering Target Load Management
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Solution Overview
Problem
Existing sputtering installations face challenges in designing a compact and reliable cathode drive unit that can sustain heavy mechanical loads over long periods while maintaining vacuum integrity and providing coolant and electrical support to rotatable targets, especially in sputtering processes where targets can be up to 4 meters long.
Innovation Solution
The design incorporates a base body rigidly connected to a non-revolving part of the deposition apparatus, featuring a rotary bearing system and a rotor that supports the rotatable target, utilizing tapered roller bearings to handle both radial and axial loads, and includes a coolant and electrical support system to maintain vacuum integrity and facilitate long-term operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If a compact cathode drive unit is designed to reduce space requirements in the vacuum chamber, then space efficiency is improved, but the ability to reliably bear heavy mechanical loads over long periods deteriorates
Solution Approach 1:
The cathode drive unit is segmented into distinct functional components: a drive mechanism portion and a bearing portion. The bearing portion includes a bearing housing with a bearing that supports the rotary cathode, while the drive mechanism is positioned separately. This segmentation allows each component to be optimized independently - the bearing can be designed for maximum load capacity while the overall unit maintains compact dimensions.
Solution Approach 2:
The patent utilizes three-dimensional spatial arrangement to achieve compactness. The bearing housing and drive mechanism are arranged in a compact configuration where components are positioned in different spatial dimensions. The rotary cathode rotates about an axis, with the bearing supporting it at a specific location, while the drive mechanism is positioned adjacent to it, creating a compact vertical arrangement that reduces the horizontal footprint in the vacuum chamber.
2Volume of moving object
If the cathode drive unit is designed with minimal space requirements, then space efficiency is improved, but the complexity of providing coolant and electrical support while maintaining vacuum integrity increases
Solution Approach 1:
The patent merges multiple support functions into an integrated cathode drive unit. The bearing housing not only supports the rotary cathode mechanically but also incorporates coolant flow paths and electrical connection points. The drive mechanism is integrated with the bearing assembly, creating a unified structure that provides mechanical support, cooling, and electrical power transmission simultaneously, thereby reducing the number of separate components and connections required.
Solution Approach 2:
The cathode drive unit is designed as a multi-functional component that simultaneously performs mechanical support, cooling, and electrical power transmission. The bearing housing serves multiple purposes: supporting the rotary cathode, guiding coolant flow, and providing a structure for electrical connections. This multi-functionality reduces the overall complexity by eliminating the need for separate dedicated components for each function.
Data Source
Figure 1A
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Figure 2
AI summary
An end-block (100, 101) and a deposition apparatus (200) including an end-block (100, 101) are provided. The end-block (100, 101) includes a base body (110) which is adapted to be connected to the deposition apparatus (200) in a non-rotational manner. The end-block (100, 101) further includes a rotary bearing (140, 141) arranged around the base body (110) and a rotor (120) which is arranged around the rotary bearing (140, 141) and adapted to receive a rotatable target (10).