End Effector Centering Grip for High-Speed Flat Workpiece Transport
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Solution Overview
Problem
Conventional gripping mechanisms for semiconductor substrates and similar flat workpieces are inadequate for high-speed transport due to complex designs, high manufacturing costs, and inability to operate in vacuum environments, often resulting in insufficient grip and lower gripper closure speeds.
Innovation Solution
A flat workpiece transport apparatus featuring a movable arm with an end effector that uses a resiliently flexible member actuated by multiple gripping elements, allowing for secure holding and release of flat workpieces through a compact and efficient mechanism that can operate in various orientations and environments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional gripping mechanisms are used for high-speed transport, then the substrate can be held securely, but the mechanism becomes complex and expensive to manufacture
Solution Approach 1:
The gripping mechanism is segmented into multiple independent grip elements (first grip element, second grip element, third grip element) that can operate autonomously. Each grip element has its own resiliently flexible member, allowing the system to achieve secure gripping through distributed contact points rather than a single complex mechanism.
Solution Approach 2:
The resiliently flexible members change their physical state from flexible (during engagement) to rigid (during transport). This parameter change allows the grip elements to provide secure holding force during high-speed transport while maintaining simplicity in the mechanism design through elastic deformation rather than complex actuation.
2Reliability
If conventional gripping mechanisms are used, then the substrate can be held securely, but the manufacturing cost increases
Solution Approach 1:
The resiliently flexible members are designed as simple, replaceable components that can be manufactured economically. Rather than using expensive, complex mechanical linkages, the invention employs straightforward elastic elements that are inexpensive to produce and can be easily replaced if needed, significantly reducing manufacturing costs while maintaining grip security.
3Reliability
If conventional gripping mechanisms are used for high-speed transport, then the substrate can be held securely, but the gripper closure speed decreases
Solution Approach 1:
The resiliently flexible members are self-actuating components that automatically engage and disengage the grip elements without requiring complex external actuation mechanisms. The elastic properties of these members enable them to snap into the engaged position rapidly, achieving high closure speeds while maintaining secure grip during transport.
4Reliability
If vacuum-based gripping systems are used, then the workpiece can be held securely, but the system cannot operate in vacuum environments
Solution Approach 1:
The invention replaces vacuum-based mechanical systems with purely mechanical elastic gripping elements. The resiliently flexible members provide holding capability through elastic deformation and mechanical contact forces, eliminating the need for vacuum ports and suction mechanisms. This substitution enables the system to operate securely in vacuum environments where vacuum-based systems would fail.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus provides a secure, efficient, and cost-effective means to grip and transport flat workpieces at high speeds, improving throughput by ensuring stable engagement and reduced inertial forces during movement, while being capable of operating in vacuum environments.
Implementation Method 1
a resiliently flexible member connecting the more than one actuation members. Each actuation member actuates at least one corresponding grip element of the movable grip to capture or release the work piece. Flexure of the resiliently flexible member effects movement of at least one of the more than one actuation members for actuation of the at least one corresponding grip element.
Data Source
AI summary
A flat workpiece transport apparatus having a movable arm and an end effector. The end effector is connected to the arm. The end effector has a movable grip for holding a flat workpiece on the end effector. The end effector has a grip actuator operably connected to the movable grip. The grip actuator has more than one actuation members and a resiliently flexible member connecting the more than one actuation members. Each actuation member actuates at least one corresponding grip element of the movable grip to capture or release the workpiece. Flexure of the resiliently flexible member effects movement of at least one of the more than one actuation members for actuation of the at least one corresponding grip element. The resiliently flexible member is sandwiched by substantially rigid portions of the more than one actuation members.