Optical End-Effector Deflection Sensing for Stable Substrate Transfer
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Solution Overview
Problem
Deflection of end-effectors in substrate transfer devices can cause substrate damage or accidents such as scratching and falling of substrate boats during transfer processes, necessitating a technology for sensing deflection and determining abnormality in the pitch between end-effectors.
Innovation Solution
A substrate transfer device equipped with a deflection sensing unit comprising a light emitting part and a light receiving part, disposed at both sides of the end-effector's movement path, to detect deflection and adjust the pitch of multiple end-effectors, using optical sensing methods to prevent substrate damage and accidents.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple end-effectors are used to reduce transfer time, then productivity is improved, but the risk of deflection and pitch abnormality increases
Solution Approach 1:
The light emitting part and light receiving part are positioned in advance to detect end-effector deflection before substrate transfer occurs. This preliminary detection allows the system to identify pitch abnormalities before they cause substrate damage, enabling preventive action while maintaining high-speed multi-end effector operation
2Reliability
If deflection sensing is added to detect end-effector position, then reliability is improved, but device complexity increases
Solution Approach 1:
The patent replaces complex mechanical sensing mechanisms with an optical sensing system using light emitting parts and light receiving parts. This substitution maintains high reliability in detecting end-effector deflection while reducing mechanical complexity and improving response speed for safety monitoring
3Manufacturing precision
If pitch adjustment mechanism is added to correct end-effector position, then manufacturing precision is improved, but device complexity increases
Solution Approach 1:
The pitch adjustment mechanism is designed to automatically correct end-effector pitch abnormalities based on feedback from the optical sensing system. The system self-regulates by detecting deflection and activating the adjustment mechanism only when needed, maintaining high pitch accuracy while minimizing the complexity of the adjustment system itself
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device effectively senses and adjusts deflection, preventing substrate damage and substrate boat accidents by accurately determining abnormality in the pitch between end-effectors, ensuring stable substrate transfer and stacking.
Implementation Method 1
a deflection sensing unit including a light emitting part and a light receiving part, which are respectively disposed at both sides of a movement path of the end-effector, and configured to sense deflection of the end-effector
Data Source
AI summary
The present disclosure relates to a substrate transfer device for sensing deflection of an end-effector and a substrate processing apparatus having the same. The substrate transfer device includes: an end-effector extending in a first direction and supporting a substrate; an end-effector hand connected with one side in the first direction of the end-effector; a horizontal movement unit connected with the end-effector hand and moving the end-effector in the first direction; and a deflection sensing unit including a light emitting part and a light receiving part, which are respectively disposed at both sides of a movement path of the end-effector, and sensing deflection of the end-effector.