End Effector Optical Path for Substrate Detection
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Solution Overview
Problem
Conventional substrate conveying robots are unable to perform both the detection of the presence or absence of a substrate in a cassette and the detection of whether a substrate is properly held, leading to a complex sensor circuit configuration.
Innovation Solution
An end effector with a hand featuring a light emitter and receiver, and an optical path that includes a slit and light guiding sections, allowing for simultaneous detection of substrate presence and holding state using a single set of light emitter and receiver, simplifying the configuration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple sensors are used to perform both substrate presence detection and holding state detection, then detection capability is improved, but device complexity increases
Solution Approach 1:
The optical sensor is designed to perform multiple functions: detecting substrate presence in the cassette and detecting whether the substrate is properly held on the end effector. By making the sensor universal, the patent eliminates the need for separate sensors for each detection function, thereby reducing device complexity while maintaining comprehensive detection capability
Solution Approach 2:
The patent combines substrate presence detection and holding state detection into a single optical sensor system. The sensor integrates multiple detection capabilities within one device, merging what would traditionally require separate sensing systems into a unified configuration that simplifies the overall sensor circuit
2Device complexity
If a single optical sensor is used for both detection functions, then device complexity is reduced, but detection accuracy may be compromised
Solution Approach 1:
The optical sensor system is segmented into distinct functional sections: a first detection section for substrate presence detection and a second detection section for holding state detection. This segmentation allows each section to be optimized for its specific detection function while being integrated within a single sensor unit, thereby maintaining high detection accuracy for both functions without increasing overall device complexity
Solution Approach 2:
The patent employs multiple detection sections within the optical sensor that operate in different spatial dimensions or orientations. By arranging detection sections in different dimensions, the system can simultaneously perform presence detection and holding state detection with high accuracy using a single integrated sensor rather than requiring multiple separate sensors
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the detection of substrate presence in a cassette and proper holding state with a simple configuration, reducing complexity and improving detection accuracy.
Implementation Method 1
a light emitter, which is built-in in the attachment plate of the hand and which is configured to convert an electrical input to generate detection light
Implementation Method 2
a light receiver, which is on an upper surface of the attachment plate of the hand and which is configured to receive the detection light and convert the detection light into an electrical output
Implementation Method 3
an optical path formed in the hand, through which the detection light emitted from the light emitter passes to be incident on the light receiver
Implementation Method 4
The optical path is formed such that the detection light is blocked by the first substrate held by the holder, and such that the detection light is blocked by the second substrate detected by the mapping detector
Data Source
Figure 1
Figure 2
Figure 3~4
AI summary
An end effector (1) according to the present invention includes: a hand (10); a substrate holder (11) provided on the hand (10); a mapping detector (12) provided at distal end portions (10b) and (10c) of the hand; a light emitter (13), which the hand (10) is provided with and which is configured to generate detection light; a light receiver (14), which the hand (10) is provided with and which is configured to receive the detection light and convert the detection light into an electrical output; and an optical path (15) formed such that the detection light emitted from the light emitter (13) passes through the optical path (15) to be incident on the light receiver (14). The optical path (15) is formed such that detection light (B1) is blocked by a substrate (W) detected in a cassette (6) by the mapping detector (12), and such that detection light (B2) is blocked by a substrate (W) held by the substrate holder (11).