End Effector Integrated Prealigner Wafer Alignment

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Solution Overview

Problem

The existing wafer handling systems require additional prealignment stations and longer process times due to the need for separate prealignment of wafers before processing, which increases installation space and processing time.

Innovation Solution

An end effector with an integrated prealigner, featuring a movable tongue and turntable, allows for partial alignment during wafer transport, eliminating the need for a separate prealigner and reducing process time by enabling alignment between the FOUP and processing stations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a separate prealigner station is used for wafer alignment, then alignment precision is improved, but device complexity and installation space increase

Engineering Contradiction:

Improvewafer alignment precisionVSAvoidsystem structure complexity

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The prealigner is integrated into the end effector, merging the alignment function with the wafer handling device. The tongue with turntable mechanism is incorporated directly into the end effector structure, eliminating the need for a separate prealigner station while maintaining alignment precision.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The end effector is designed to perform multiple functions: wafer pickup, transport, and alignment. By incorporating the prealigner with tongue and turntable into the end effector, the device becomes universal, handling both transportation and alignment tasks that previously required separate dedicated stations.

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Manufacturing precision

If a separate prealigner station is used for wafer alignment, then alignment precision is improved, but installation space increases

Engineering Contradiction:

Improvewafer alignment precisionVSAvoidinstallation space

Core Design Contradiction:

Manufacturing precisionVSArea of stationary object

Solution Approach 1:

Inventive Principle:

Principle #5Merging (Combining)

3Manufacturing precision

If a separate prealigner station is used for wafer alignment, then alignment precision is improved, but process time increases

Engineering Contradiction:

Improvewafer alignment precisionVSAvoidprocess time

Core Design Contradiction:

Manufacturing precisionVSLoss of time

Solution Approach 1:

The alignment action is performed preliminarily during the wafer transport phase rather than requiring a separate post-transport alignment station. The tongue and turntable mechanism enable alignment to be completed before the wafer reaches the processing station, reducing overall process time.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The alignment process continues during the transport motion itself. As the end effector moves the wafer from the FOUP to the processing station, the tongue and turntable perform alignment operations simultaneously, maintaining continuous useful action without interrupting the workflow.

Inventive Principle:

Principle #20Continuity of useful action

4Reliability

If an extendable vacuum clamping device is used in the end effector, then wafer holding reliability is improved, but device complexity increases

Engineering Contradiction:

Improvewafer holding reliabilityVSAvoidend effector structure complexity

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The vacuum clamping device is nested within the end effector structure. The extendable fingers with vacuum channels are integrated into the existing end effector body, allowing the clamping mechanism to be contained within the overall device structure rather than adding external complexity.

Inventive Principle:

Principle #7Nested doll (Nesting)

Data Source

PatentEP3093879B1End effector of a wafer handling system and wafer handling system

Publication Date: 2021.07.07 INTEGRATED DYNAMICS ENG

Figure 1a~1d
Figure 1e~2b
Figure 2c~2e

AI summary

The invention relates to an end effector with an integrated prealigner, which preferably comprises a movable tongue with a rotary plate.