End Effector Segmented Pads for Substrate Isolation
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Solution Overview
Problem
Substrate processing systems face challenges in preventing heat and contamination transfer from processed substrates to unprocessed substrates during handling, leading to non-uniform processing results and defects.
Innovation Solution
The use of an end effector with distinct sets of substrate support pads that engage and disengage the substrate in different positions to prevent contamination, where the first set supports unprocessed substrates and the second set supports processed substrates, ensuring that heat and contaminants are not transferred between them.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single set of substrate support pads is used to handle both unprocessed and processed substrates, then the device complexity is reduced, but heat and contamination are transferred from processed to unprocessed substrates
Solution Approach 1:
The substrate support pads are segmented into two distinct sets: a first set for supporting unprocessed substrates and a second set for supporting processed substrates. This segmentation prevents heat and contamination transfer between substrate types while maintaining manageable device complexity through modular design.
Solution Approach 2:
Different regions of the end effector are assigned different functional qualities: the first substrate support pads are positioned and configured for clean substrate handling, while the second substrate support pads are positioned and configured for processed substrate handling. This local differentiation ensures appropriate handling characteristics for each substrate type.
2Manufacturing precision
If the end effector moves closer to the processing chamber to engage substrates, then the handling precision is improved, but the risk of contamination transfer increases
Solution Approach 1:
The engagement process is segmented into two distinct phases: first engagement with unprocessed substrates using the first substrate support pads, and second engagement with processed substrates using the second substrate support pads. This temporal and spatial segmentation allows precise positioning while minimizing contamination risk by preventing simultaneous contact with both substrate types.
Solution Approach 2:
The second substrate support pads act as an intermediary that engages processed substrates first, creating a controlled transition zone that prevents direct contact between processed and unprocessed substrates during chamber entry, thereby maintaining precision while reducing contamination exposure.
3Ease of manufacture
If the end effector structure is simplified with fewer substrate support pads, then the ease of manufacture is improved, but the ability to isolate processed and unprocessed substrates is reduced
Solution Approach 1:
The substrate support pads are segmented into two functional sets within the end effector structure. This segmentation provides reliable contamination isolation through dedicated support regions while maintaining manufacturing simplicity by using a unified end effector body and standardized pad configurations.
Solution Approach 2:
The end effector is designed as a universal tool that performs multiple functions: it can support both unprocessed and processed substrates, engage substrates at different positions, and transition between different handling modes. This multi-functionality achieves reliable isolation without requiring multiple separate tools, thereby maintaining ease of manufacture.
Data Source
AI summary
An end effector includes a body, a first tine, and a second tine. The body includes first, second, and third substrate support pads, the first substrate support pad defines a first height, the second substrate support pad defines a second height less than the first height, and the third substrate support pad defines a third height equal to the first height. The first tine includes fourth and fifth substrate support pads, the fourth substrate support pad defines a fourth height equal to the second height, and the fifth substrate support pad defines a fifth height equal to the first and third heights. The second tine includes sixth and seventh substrate support pads, the sixth substrate support pad defines a sixth height equal to the first, third, and fifth heights, the seventh substrate support pad defines a seventh height equal to the second and fourth heights.