Robot End Effector State Switching for Continuous Substrate Placement
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional robot control devices face challenges in promptly transferring substrates while holding them due to the need to determine and stop the end effector at specific installation positions, which slows down the process.
Innovation Solution
A robot control device and method that switches between holding and non-holding states by moving the end effector between two teaching points without determining if it passes the installation position, allowing for uninterrupted substrate transfer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the robot control device determines whether the end effector passes the installation position and stops the end effector, then the substrate transfer accuracy is improved, but the substrate transfer speed deteriorates
Solution Approach 1:
The patent applies preliminary action by pre-defining teaching points (first teaching point above installation position, second teaching point below installation position) and switching between predetermined states (first state: holding substrate, second state: not holding substrate) based on end effector position. This allows the system to bypass real-time determination and stopping at the installation position, achieving both high accuracy through predefined positions and high speed through uninterrupted motion.
2Manufacturing precision
If the robot control device performs determination and stopping at the installation position, then the substrate placement precision is improved, but the productivity deteriorates
Solution Approach 1:
The system pre-establishes teaching points and state switching rules before operation. The first teaching point corresponds to the first state (holding substrate), and the second teaching point corresponds to the second state (not holding substrate). By switching between these predetermined states based on position, the system achieves precise substrate placement without the need for real-time determination and stopping, thereby maintaining high productivity.
3Measurement precision
If the robot control device determines whether the end effector passes the installation position, then the control accuracy is improved, but the operation time deteriorates
Solution Approach 1:
The patent implements preliminary action by pre-defining teaching points and corresponding states. The control device switches between the first state and second state based on whether the end effector is at the first teaching point or second teaching point, respectively. This eliminates the need for continuous determination and stopping during substrate transfer, achieving both high control accuracy through predefined positions and reduced operation time through uninterrupted motion.
Data Source
AI summary
A robot control device configured to control operation of a robot configured to transfer a substrate while holding the substrate is provided. The substrate becomes in a first state where an end effector holds the substrate and the substrate is not placed at an installation position, when the end effector positions at a first teaching point above the installation position. The substrate becomes in a second state where the end effector does not hold the substrate and the substrate is placed at the installation position, when the end effector positions at a second teaching point below the installation position. The first and second states can be switched by causing the robot to perform a first operation to move the end effector from either one of the first teaching point and the second teaching point to the other one of the first teaching point and the second teaching point.