End Effector Layout for Wafer and Consumable Part Transfer
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Solution Overview
Problem
Existing transfer systems face challenges in reducing the footprint of the entire system, including the transfer device, due to the need to accommodate consumable parts larger than wafers, which obstructs the transfer of wafers into apparatuses with limited space.
Innovation Solution
A transfer device with an end effector that simultaneously or separately transfers wafers and consumable parts, where the consumable part's center of gravity is positioned away from the end effector's front ends to prevent falling, and the wafer's center of gravity is positioned between the consumable part's position and the end effector's front ends to minimize obstruction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the consumable part is placed on the end effector such that its center of gravity coincides with the first position (away from front ends), then the consumable part can be stably transferred without falling, but the footprint of the entire system increases due to the larger size of the consumable part
Solution Approach 1:
The end effector is designed with a movable platform that can dynamically adjust its configuration. When transferring the consumable part, the platform extends to accommodate the larger size and position the part's center of gravity at the first position. When transferring the wafer, the platform retracts to minimize obstruction and allow the wafer's center of gravity to be positioned at the second position. This dynamic adjustment resolves the contradiction by adapting the end effector's geometry to the specific transfer task.
Solution Approach 2:
The end effector utilizes vertical dimension by extending the platform in the length direction when needed. The platform can extend beyond the front ends of the end effector body during consumable part transfer, effectively using the third dimension (length extension) to accommodate the larger part without increasing the horizontal footprint of the end effector body itself.
2Area of stationary object
If the wafer is placed on the end effector such that its center of gravity coincides with the second position (between first position and front ends), then the wafer can be transferred with minimal obstruction to apparatuses with limited space, but the wafer may become unstable during transfer
Solution Approach 1:
The movable platform dynamically adjusts its position and extension based on the transfer task. During wafer transfer, the platform is positioned to extend slightly beyond the front ends, providing adequate support surface area for wafer stability while the wafer's center of gravity is positioned at the second position. This dynamic configuration ensures both stability and minimal obstruction.
Solution Approach 2:
The end effector platform has different functional zones: the first position area optimized for large consumable parts and the second position area optimized for smaller wafers. The platform's local geometry and support surface are tailored to each position, providing appropriate stability characteristics for each type of object being transferred.
3Reliability
If the end effector is designed to accommodate the larger consumable part, then the consumable part can be transferred stably, but the end effector obstructs the transfer of wafers into apparatuses with limited space
Solution Approach 1:
The end effector employs a movable platform that can extend and retract along the length direction. When transferring consumable parts, the platform extends to accommodate the larger size and position the part's center of gravity at the first position for stability. When transferring wafers, the platform retracts to minimize the overall length of the end effector, allowing wafers to be transferred into apparatuses with limited space without obstruction.
Solution Approach 2:
The end effector is segmented into a fixed body and a movable platform. The fixed body maintains the structural integrity and housing, while the movable platform can be independently positioned and extended. This segmentation allows the platform to be extended only when needed for consumable part transfer, and retracted for wafer transfer, resolving the contradiction between accommodating large parts and maintaining ease of operation for wafers.
Data Source
AI summary
A transfer device for simultaneously or separately transferring a wafer and a consumable part having a circular shape is disclosed. The consumable part is disposed in a wafer processing module, and the outer diameter of the consumable part is larger than the outer diameter of the wafer. The transfer device comprises an end effector configured to place the wafer and the consumable part thereon simultaneously or separately, an arm configured to move the end effector, and a controller configured to control the arm, to place the consumable part on the end effector such that the center of gravity of the consumable part coincides with a first position when transferring the consumable part, and to place the wafer on the end effector such that the center of gravity of the wafer coincides with a second position between the first position and front ends of the end effector when transferring the wafer.