End Handler Vacuum Ports for Film Frame Stability
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Solution Overview
Problem
Conventional end handlers for film frames in semiconductor manufacturing suffer from weak suction force, leading to instability during handling and transportation, especially at higher speeds, and increased thickness that complicates access to standard cassettes, resulting in potential damage and reduced efficiency.
Innovation Solution
The design features vacuum ports with reservoirs and ported grooves that increase the surface area for suction, allowing for a stronger vacuum force by applying suction through a larger area, which is fluidly connected to a vacuum source, preventing film distension and maintaining a slim profile for easier access.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Force
If protruded vacuum pads are used to increase suction area, then the vacuum force is improved, but the overall thickness of the end handler increases making it difficult to access standard cassettes
Solution Approach 1:
The vacuum ports transition from a protruding three-dimensional structure to a planar two-dimensional structure by forming reservoirs within the same plane as the end handler surface. This dimensional change allows the vacuum suction area to be expanded without increasing the thickness, enabling the end handler to access standard cassettes while maintaining enhanced vacuum force through the reservoir-groove structure.
2Length of moving object
If conventional tiny vacuum openings are used, then the end handler maintains a thin profile, but the suction force is weak causing film frames to slide or drop at higher speeds
Solution Approach 1:
The invention expands the vacuum suction area from tiny point openings to an extended planar surface by creating reservoirs with surface openings and ported grooves. This dimensional expansion of the suction interface dramatically increases the effective vacuum force while keeping the end handler profile thin, as the enhanced suction area lies within the same plane rather than protruding outward.
Solution Approach 2:
The reservoir-groove structure functions as a pneumatic amplification system where vacuum pressure applied through small openings is distributed and amplified across a large surface area. The reservoirs and grooves create a fluid pressure distribution that multiplies the effective suction force, allowing weak vacuum openings to generate strong holding force across the entire film frame surface.
3Force
If protruded vacuum pads are used, then vacuum suction is improved, but the film becomes irreversibly distended or deformed over time
Solution Approach 1:
By transitioning from protruding three-dimensional vacuum pads to planar two-dimensional reservoir structures, the invention eliminates the mechanical intrusion that causes film distension. The vacuum suction is applied through surface openings and grooves that lie within the same plane as the end handler, creating a distributed suction field that holds the film without concentrating stress at protruding contact points, thereby preserving film integrity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances the suction force significantly, enabling secure handling and transportation of film frames at higher speeds while maintaining a thin profile, reducing the risk of damage and improving operational efficiency by allowing for more efficient loading and unloading of cassettes.
Implementation Method 1
when vacuum pressure is applied through the tiny openings in the vacuum pads, they purport to hold the entire film frame during handling and transportation
Data Source
Figure 1
Figure 2a1
Figure 2a2
AI summary
An end handler and method for processing a device are presented. The end handler includes a mating portion for mating with a tool and a support portion for supporting a film frame on a support surface. The support portion includes a support base section, extension sections extending from the support base section, and vacuum ports on the support surface for facilitating mating of the film frame on the support surface. Each of the vacuum port includes at least one reservoir having at least one vacuum opening in fluid communication with at least one vacuum source. The vacuum ports being configured to principally maintain a slimmest profile with strongest suction force possible.