Photoresist Arm Centering Jig With Endoscope Chuck Alignment
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Solution Overview
Problem
In the semiconductor industry, the increasing demand for higher device density requires precise centering of photoresist nozzle tips during photolithography, which is challenging due to the reduced size and increased precision of these components, leading to potential coating defects and inefficiencies in the fabrication process.
Innovation Solution
The implementation of an alignment nozzle jig system that includes an endoscope and alignment nozzle block, coupled with a coater arm, allows for accurate centering of the photoresist nozzle assemblies over the wafer chuck, utilizing a view screen to align the nozzle tip with the vacuum hole, thereby ensuring precise placement and reducing manual adjustment time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of substance
If the photoresist nozzle tip size is reduced to decrease photoresist usage, then the amount of photoresist used is reduced, but the centering precision requirement increases significantly
Solution Approach 1:
An alignment jig is introduced as an intermediary tool between the nozzle tip and the wafer chuck. The alignment jig includes alignment features that interface with both the nozzle tip and the chuck, providing a mechanical mediation system for precise positioning. This intermediary device enables accurate centering without requiring direct manual adjustment of the tiny nozzle tip, thus maintaining high precision while working with reduced nozzle sizes.
Solution Approach 2:
The patent replaces manual mechanical adjustment of the nozzle tip with an automated optical-mechanical alignment system. The alignment jig incorporates optical alignment features (such as alignment marks visible through the chuck) that guide the positioning mechanism, substituting operator skill-based mechanical adjustment with a more precise and repeatable system that combines optical reference with mechanical positioning.
2Ease of operation
If manual centering adjustment is used for photoresist nozzle tips, then the process is simple, but the centering accuracy is insufficient and time-consuming
Solution Approach 1:
The alignment jig serves as a mechanical intermediary that translates simple operational actions into precise positioning. The jig includes features such as alignment holes and reference marks that guide the nozzle tip into correct position, maintaining ease of operation while achieving high accuracy through the intermediary alignment structure.
Solution Approach 2:
The alignment system incorporates visual feedback mechanisms where alignment marks or features are visible through the wafer chuck, allowing the operator to see when proper alignment is achieved. This feedback loop enables accurate centering without requiring complex measurement equipment, maintaining operational simplicity while improving precision.
3Loss of substance
If the photoresist nozzle tip is smaller for reduced material usage, then photoresist consumption decreases, but the difficulty of detecting and measuring tip position increases
Solution Approach 1:
The alignment jig introduces larger, more easily detectable alignment features as intermediaries for position detection. Instead of trying to directly locate and position the tiny nozzle tip, the system uses the alignment jig's larger alignment holes and reference marks as mediators, making position detection significantly easier while maintaining precise nozzle positioning.
Solution Approach 2:
The alignment system creates an optical or visual copy/reference of the desired nozzle position through alignment marks visible through the chuck. This copying approach allows the operator to see the target position clearly without needing to directly observe the tiny nozzle tip, making position detection and measurement much easier.
Data Source
AI summary
An alignment nozzle jig for centering a coater photoresist arm that includes an alignment nozzle block. The alignment nozzle jig also includes an endoscope holder removably secured to a bottom of the alignment nozzle block, an endoscope, and an alignment mark removably coupled to the endoscope holder opposite the alignment nozzle block. The alignment nozzle jig is retrieved from a nozzle bath by the coater arm and transferred to a center of a chuck in an associated process chamber. Via the endoscope, the coater photoresist arm is aligned with the center of the chuck using the alignment mark.