Online Energy Beam Surface Figuring With Integrated Profile Feedback

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Solution Overview

Problem

Current surface figuring methods, such as MRF and IBF, are inefficient and costly, lack integrated surface profile detection systems, and require offline coordinate correction, limiting their application in mass production due to high equipment costs and environmental constraints.

Innovation Solution

A surface processing equipment and method utilizing a multi-axis platform, surface profile measuring device, and energy beam generator, where a computing device adjusts the energy beam parameters based on surface topography variations to achieve precise non-contact surface figuring.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If IBF (Ion Beam Figuring) is used to achieve high precision surface figuring with atomic-scale removal, then manufacturing precision is improved, but processing time increases and equipment cost increases

Engineering Contradiction:
Improvesurface irregularityVSAvoidprocessing time
Core Design Contradiction:
Manufacturing precisionVSLoss of time

Solution Approach 1:

The patent changes the fundamental parameter of material removal mechanism from atomic-scale ion bombardment (IBF) to macro-scale ablation using high-power laser or plasma beams. This parameter change enables rapid removal of large amounts of material while maintaining surface precision through real-time feedback control, resolving the contradiction between atomic-scale precision and processing time

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The system performs preliminary surface measurement and error profile analysis before the figuring process, then uses this information to pre-calculate the optimal energy beam parameters and scanning path. This preliminary action enables the energy beam to directly target and remove material at the correct locations, achieving high precision without the need for slow atomic-scale processing

Inventive Principle:
Principle #10Preliminary action

2Productivity

If MRF (Magnetorheological Finishing) is used to improve production efficiency, then productivity is improved, but equipment cost increases and polishing liquid cannot be recycled

Engineering Contradiction:
Improveproduction efficiencyVSAvoidequipment construction cost
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent replaces the complex mechanical MRF system with magnetic fields and ferrofluid manipulation by energy beams, eliminating the need for expensive MRF equipment while maintaining high productivity. The energy beam system achieves similar or better results through non-contact ablation, reducing equipment complexity and cost

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The system changes from chemical-mechanical polishing (MRF) to physical ablation by energy beams, fundamentally altering the material removal mechanism. This parameter change eliminates the need for specialized MRF equipment and polishing liquids, reducing both equipment cost and operational complexity while maintaining high production efficiency

Inventive Principle:
Principle #35Parameter changes

3Measurement precision

If offline measurement and coordinate correction is used, then measurement capability is maintained, but processing efficiency decreases and systems are not integrated

Engineering Contradiction:
Improvesurface profile measurementVSAvoidprocessing efficiency
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The patent merges the measurement system and processing system into a single integrated online figuring system. The surface profiler and energy beam generator are combined in one system, allowing real-time measurement and immediate correction without removing the optical element from the system. This eliminates the offline measurement bottleneck and achieves both high precision and high efficiency

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The system implements real-time feedback control by continuously measuring the surface profile during the figuring process and immediately adjusting the energy beam parameters based on the measured error profile. This closed-loop feedback enables the system to maintain high precision while operating continuously, eliminating the time loss associated with offline measurement and correction cycles

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables high-precision surface processing with reduced irregularities and lower costs by integrating online surface profile detection and dynamic energy beam adjustment, suitable for mass production environments.

Implementation Method 1

The principle of IBF is to bombard and remove atoms on the surface of the lens with a high-energy ion beam

Methodology Applied
Scientific EffectIon Beam: Ion Beam

Implementation Method 2

uses an energy beam to perform the etching and removal of the lens surface

Methodology Applied
Scientific EffectLaser Ablation: Laser Ablation

Data Source

PatentUS12154768B2Surface processing equipment and surface processing method
Publication Date: 2024.11.26 IND TECH RES INST
  • US12154768B2 patent drawing
  • US12154768B2 patent drawing
  • US12154768B2 patent drawing

AI summary

A surface processing equipment using energy beam including a multi-axis platform, a surface profile measuring device, an energy beam generator and a computing device is provided. The multi-axis platform is configured to carry a workpiece and move the workpiece to the first position or the second position. The surface profile measuring device has a working area, and the first position is located on the working area. The surface profile measuring device is configured to measure the workpiece to obtain surface profile. The energy beam generator is configured to provide an energy beam to the workpiece for processing, and the second position is located on a transmission path of the energy beam. The computing device is connected to the surface profile measuring device and the energy beam generator. The computing device adjusts the energy beam generator according to the error profile.