Energy Beam Write Data Generation for Resizing Semiconductor Patterns

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Existing energy beam writing technologies face challenges in accurately resizing complex patterns due to incorrect or missing resizing information, leading to precision issues in forming desired circuit patterns on semiconductor wafers.

Innovation Solution

A method involving connecting pattern vertices with vectors, extracting collinear vectors, and dividing the pattern into figures using lines orthogonal to these vectors to generate precise write data with resizing information, ensuring accurate resizing and pattern representation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If resizing is performed in the writing apparatus, then the writing apparatus can handle size fluctuations, but correct resizing information may fail to be added depending on pattern shape or division method

Engineering Contradiction:

Improveresizing accuracyVSAvoiddata processing complexity

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The patent applies preliminary action by performing pattern division and resizing information assignment before writing. The control apparatus divides the pattern into figures and assigns resizing information to each figure in advance, ensuring that correct resizing information is always attached before the writing process begins, thus preventing the failure to add resizing information that occurs with complex patterns.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The patent applies segmentation by dividing the overall pattern into multiple smaller figures that can be individually processed. By segmenting the pattern and assigning resizing information to each segment separately, the system ensures that resizing information is correctly attached to each figure regardless of the overall pattern complexity, resolving the issue of missing resizing information.

Inventive Principle:

Principle #1Segmentation

2Adaptability or versatility

If patterns are divided into figures for writing, then the writing apparatus can process complex shapes, but resizing information may be lost or incorrect for certain pattern configurations

Engineering Contradiction:

Improvepattern processing capabilityVSAvoidresizing information

Core Design Contradiction:

Adaptability or versatilityVSLoss of information

Solution Approach 1:

The patent applies feedback by implementing a control apparatus that systematically manages the division and resizing information assignment process. The control apparatus ensures that resizing information is correctly assigned to each divided figure by controlling the division process and verifying the assignment, thus preventing information loss that occurs with complex pattern divisions.

Inventive Principle:

Principle #23Feedback

Solution Approach 2:

The patent performs the division and resizing information assignment as preliminary actions before the actual writing process. By establishing the correct resizing information for each figure in advance through controlled division, the system prevents information loss that would otherwise occur during the writing of complex patterns.

Inventive Principle:

Principle #10Preliminary action

3Adaptability or versatility

If figure division is performed to handle various pattern shapes, then the writing apparatus can write diverse patterns, but the connection and precision of resized patterns may be compromised

Engineering Contradiction:

Improvepattern shape handlingVSAvoidpattern writing precision

Core Design Contradiction:

Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The patent applies preliminary action by performing figure division and resizing information assignment before the writing process. The control apparatus divides patterns into figures and assigns appropriate resizing information to each figure in advance, ensuring that when figures are resized during writing, the connections and precision are maintained according to the pre-established resizing information.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The patent applies segmentation by dividing complex patterns into manageable figures while maintaining the ability to handle diverse shapes. By segmenting patterns into figures with assigned resizing information, the system can process various shapes while preserving connection and precision through the controlled division and resizing information management.

Inventive Principle:

Principle #1Segmentation

Data Source

PatentUS9659747B2Method of generating write data for energy beam writing apparatus, method of writing with energy beam, and energy beam writing apparatus

Publication Date: 2017.05.23 NUFLARE TECH INC

AI summary

In one embodiment, a method is for generating write data for resizing a write pattern to be written with an energy beam. The method includes connecting vertices of the write pattern with a plurality of vectors, extracting a pair of collinear vectors pointing in opposite directions from the vectors, dividing the write pattern into a plurality of figures with a line passing between two adjacent ends of the extracted pair of vectors and extending in a direction orthogonal to the pair of vectors, and generating write data for each of the figures, the write data containing figure data and resizing information, the figure data indicating a shape, a size, and a position of the figure, the resizing information indicating resizing or non-resizing, resizing directions in the resizing, and an amount of resizing in each of the resizing directions.