Structured Energy Filter Membrane for Ion Implantation Cooling
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Solution Overview
Problem
Existing ion implantation devices face issues with localized heating and thermal stress in energy filters due to ion beam absorption, leading to mechanical deformation and damage, which affect wafer quality and require inefficient cooling mechanisms.
Innovation Solution
The energy filter in the ion implantation device incorporates an additional thermal energy dissipation surface area through microstructures on the membrane and a cooling system with conduits and absorber elements to enhance cooling efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the energy filter absorbs ion beam energy to create depth profiles, then the energy filtering function is improved, but localized heating and thermal stress increase causing mechanical deformation and damage
Solution Approach 1:
The patent extends the energy filter from a two-dimensional membrane to a three-dimensional structure by adding protrusions that extend into the ion beam path. This dimensional change increases the surface area for energy absorption while simultaneously providing thermal mass and potential cooling channels to manage the generated heat, thus resolving the contradiction between effective energy filtering and thermal management.
Solution Approach 2:
The patent introduces a cooling system as an intermediary between the energy filter and the heat generated during ion beam absorption. The cooling system acts as a heat sink and thermal management mechanism, allowing the energy filter to absorb ion beam energy effectively while the cooling system removes the generated heat, preventing localized heating and mechanical deformation.
2Temperature
If conventional cooling mechanisms are used, then cooling is provided, but the cooling efficiency is insufficient to prevent thermal stress and mechanical deformation
Solution Approach 1:
The patent segments the energy filter structure by adding protrusions that create multiple surfaces and potential cooling channels. This segmentation increases the surface area for heat dissipation and allows for more effective cooling fluid flow paths, improving cooling efficiency and preventing thermal stress-induced mechanical deformation.
Solution Approach 2:
The patent employs a cooling system using fluids (pneumatics or hydraulics) to enhance heat removal from the energy filter. The cooling fluid flows through channels or contacts the filter surface, efficiently carrying away heat generated during ion beam absorption, thus improving cooling efficiency and preventing mechanical deformation.
3Reliability
If the membrane thickness is increased to improve energy absorption, then the energy filtering capability is enhanced, but the mechanical strength and resistance to thermal stress are reduced
Solution Approach 1:
The patent applies local quality by creating protrusions with specific geometries that concentrate energy absorption in certain regions while maintaining thinner sections elsewhere. The protrusions provide localized energy absorption capability enhanced by increased surface area, while the overall membrane structure maintains adequate mechanical strength through optimized thickness distribution.
Solution Approach 2:
The patent may employ composite material structures in the energy filter membrane, combining materials with different properties to achieve both high energy absorption capability and sufficient mechanical strength. The composite structure allows optimization of each material's contribution to either energy filtering or mechanical support.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design effectively reduces thermal stress and homogenizes temperature across the filter, preventing mechanical deformation and improving wafer quality by enhancing cooling efficiency.
Implementation Method 1
an ion beam source (5) arranged to generate an ion beam (10)
Implementation Method 2
The energy of the lower ion beam 10-2 on the left-hand side is absorbed substantially by the energy filter 25
Implementation Method 3
a cooling system with conduits and absorber elements to enhance cooling efficiency
Implementation Method 4
a cooling system with conduits and absorber elements to enhance cooling efficiency
Implementation Method 5
an additional thermal energy dissipation surface area through microstructures on the membrane
Data Source
AI summary
An ion implantation device (20) comprising an energy filter (25), wherein the energy filter (25) has a thermal energy dissipation surface area, wherein the energy filter (25) comprises a membrane with a first surface and a second surface disposed opposite to the first surface, the first surface being a structured surface.