Energy Refeeding Transformer for Rectangular Plasma Voltage Pulses

A transformer is introduced as an intermediary component between the DC voltage source and the switching circuit. The transformer's primary winding connects to the switching unit while the secondary winding connects to the rectifying circuit, which in turn connects to the DC voltage source. This intermediary transformer structure enables high voltage generation through electromagnetic induction without requiring series connection of switches, thereby eliminating the need for complex voltage balancing means.

The patent replaces the mechanical/electrical series connection of semiconductor switches with a magnetic field-based transformer system. Instead of directly connecting multiple switches in series to achieve high voltage, the system uses electromagnetic induction in the transformer to step up the voltage, substituting the direct electrical connection approach with a field-based energy transfer mechanism.

The energy refeeding module enables continuous energy transfer to the capacitive plasma load. Instead of discrete pulse-by-pulse charging and discharging, the transformer and rectifying circuit provide continuous energy replenishment to the load capacitance, maintaining plasma processing while significantly reducing the power loss associated with repeated charging cycles.

The energy refeeding module recovers and reuses energy that would otherwise be lost during the plasma processing cycles. The transformer and rectifying circuit capture residual energy from the capacitive load and feed it back into the system, reducing overall power consumption while maintaining continuous plasma processing capability.