Energy Resolved Chroma Imaging for Simultaneous Spatial and Compositional Data
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Solution Overview
Problem
Current imaging modalities, such as electron diffraction and energy-loss spectroscopy, either preserve spatial or compositional information but not both, limiting the ability to derive simultaneous spatial and compositional data from a single image in charged particle beam imaging.
Innovation Solution
A method involving irradiation of a sample with a charged particle beam, directing scattered particles to form a first image, dispersing them based on energy through a spectrometer, and forming a second image where scattered particles are spread along energy spread vectors, allowing simultaneous recording of energy loss and scattering angle information.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If electron diffraction imaging is used to preserve spatial information, then spatial resolution is improved, but compositional information is lost
Solution Approach 1:
The patent introduces an energy dimension to the traditional spatial imaging by using a spectrometer to disperse electrons according to their energy levels. This creates an energy-resolved chroma image where each spatial location contains information about electrons with different energies, enabling simultaneous extraction of both spatial and compositional information from a single image without compromising spatial resolution.
2Loss of information
If electron energy loss spectroscopy is used to preserve compositional information, then compositional analysis is improved, but spatial information is lost
Solution Approach 1:
The patent combines energy loss spectroscopy with spatial imaging by dispersing electrons in the energy dimension while maintaining their spatial distribution. The spectrometer separates electrons based on energy loss, and the energy-resolved chroma image preserves the spatial coordinates of scattered electrons, allowing compositional information to be extracted without sacrificing spatial resolution.
3Measurement precision
If energy filtered transmission electron microscopy is used to detect electrons at certain energy level, then energy selection is improved, but compositional information is lost
Solution Approach 1:
The patent segments the electron spectrum into multiple energy components and records them simultaneously in the energy-resolved chroma image. Instead of filtering to detect only one energy level, the system captures electrons across the full energy range with their spatial and energy information preserved, allowing post-processing extraction of compositional information from the complete energy distribution.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the extraction and differentiation of spatial and compositional information from a single energy resolved chroma image, enhancing imaging efficiency by avoiding detector saturation and facilitating the identification of diffraction spots.
Implementation Method 1
dispersing the scattered charged particles based on energies of the scattered charged particles by passing the scattered charged particles through the spectrometer
Implementation Method 2
Arrangement of atoms (or more precisely, the distribution of spatial frequencies) of the sample may be identified based on the scattering angles of the elastically scattered electrons
Implementation Method 3
Composition of the sample may be identified based on the energy loss of the inelastically scattered electrons
Data Source
AI summary
Various methods and systems are provided for generating an energy resolved chroma image of a sample. Upon irradiated by a charged particle beam, scattered charged particles from the sample are directed to form a first image before entering a spectrometer. The scattered charged particles are then dispersed based on their energy when passing through the spectrometer. The dispersed particles form a second image on a detector. The scattered particles at each location of the first image is spread along a corresponding energy spread vector in the second image.