Enhancement Grating Amplifies tSAXS Scattering Intensity
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Solution Overview
Problem
Current transmission small-angle X-ray scattering (tSAXS) techniques face challenges in achieving sufficient scattering intensity for nanoscale feature measurements, particularly in the semiconductor industry, due to limitations in X-ray intensity and flux from laboratory sources, which hinder throughput and practical application in high-volume manufacturing.
Innovation Solution
An apparatus is introduced that includes an enhancement grating object positioned within the longitudinal coherence length of an incident X-ray beam from a target object, with a placement mechanism allowing nanometer precision alignment, to amplify scattering intensity by interacting with the X-ray beam and enhancing the detectable signal.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional tSAXS measurement is used with laboratory X-ray sources, then the measurement can be performed with available equipment, but the scattering intensity is insufficient leading to long measurement times and low throughput
Solution Approach 1:
An enhancement grating is introduced as an intermediary component between the target object and the detector. This grating modulates the X-ray beam to create interference patterns that amplify the scattering signal from the target structure, thereby increasing detectable intensity without requiring higher source flux
Solution Approach 2:
The system changes the measurement parameters by introducing a periodic modulation structure (enhancement grating) that transforms the scattering signal into a modulated interference pattern. This parameter transformation enhances the detectability of weak scattering signals from nanoscale features
2Measurement precision
If longer measurement times are used to accumulate sufficient scattering signal, then measurement precision improves, but productivity and throughput decrease
Solution Approach 1:
The enhancement grating acts as a signal amplifier that increases the scattering intensity detected from the target object. By modulating the X-ray beam through the enhancement grating, the system achieves better signal quality in reduced measurement time
Solution Approach 2:
The enhancement grating is pre-positioned within the longitudinal coherence length of the incident X-ray beam before measurement begins. This preliminary arrangement ensures that the beam is properly conditioned to produce enhanced scattering signals from the target object
3Ease of operation
If the enhancement grating is positioned at greater distance from the target object, then alignment complexity decreases, but the scattering intensity enhancement effect diminishes
Solution Approach 1:
The system operates within the longitudinal coherence length parameter regime, which provides a specific distance range where the enhancement effect is maximized. By controlling the positioning within this coherence length, the system achieves optimal enhancement while maintaining practical alignment requirements
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly enhances the scattering intensity from the target object, reducing measurement time and improving signal quality, thereby facilitating more efficient critical dimension characterization and increasing the practicality of tSAXS for in-line IC metrology applications.
Implementation Method 1
an enhancement grating object positioned within a longitudinal coherence length of an incident X-ray from a target object
Implementation Method 2
amplify scattering intensity by interacting with the X-ray beam
Data Source
Figure 1~2
Figure 3a
Figure 3b~3c
AI summary
The disclosure provides an apparatus for amplifying scattering intensity during tSAXS measurements. The apparatus includes an enhancement grating object (14) and a placement mechanism. The enhancement grating object is positioned within a longitudinal coherence length of an incident X-ray from a target object (12). The placement mechanism is capable of placing the enhancement grating object with nanometer precision with respect to the target object in both a lateral and a longitudinal directions.