Environmental Cell Structure for Low-Scattering Electron Microscopy
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Solution Overview
Problem
Electron beam scattering occurs when the electron beam passes through the membranes in environmental cells used for electron microscope observations, leading to deteriorated image quality.
Innovation Solution
The environmental cell design includes a first and second chip with membranes and frames, and a sample holding member is strategically placed on the second membrane to support the sample, allowing for precise control of the sample environment without membrane deflection affecting the electron beam.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If membranes are used to seal the sample space in environmental cells, then the sample can be held in liquid or gas environment for observation, but electron beam scattering occurs when passing through the membranes leading to deteriorated image quality
Solution Approach 1:
The environmental cell is divided into two separate chips (first chip and second chip), each with its own membrane and opening portion. The opening portions are positioned to overlap when viewed from the top, creating a region where electron beams can pass through with minimal interaction with membrane material, thus reducing scattering while maintaining the sealed environment capability
Solution Approach 2:
The invention transitions from a single-plane membrane structure to a three-dimensional arrangement where two membranes are separated by a spacer, with opening portions positioned to overlap in the vertical dimension. This spatial reconfiguration allows electron beams to pass through the overlapping opening regions without encountering membrane material, eliminating the scattering problem while preserving environmental control
2Measurement precision
If membranes are made thinner to reduce electron beam scattering, then image quality improves, but membrane strength and sealing capability deteriorate
Solution Approach 1:
The sealing function is segmented between two separate membranes on different chips, allowing each membrane to maintain adequate thickness for strength while the overlapping opening portions provide electron beam access paths that minimize scattering
Solution Approach 2:
A spacer is introduced as an intermediary element between the first and second membranes, maintaining a controlled distance that allows the opening portions to overlap. This spacer enables the membranes to be sufficiently thick for structural integrity while still permitting electron beams to pass through the overlapping opening regions with minimal scattering
Data Source
AI summary
In liquid environment observation or gas environment observation using an environmental cell, highly accurate measurement is possible without being affected by deflection of a membrane. A environmental cell for holding a sample to be observed by an electron microscope includes: a first chip including a first membrane and a frame supporting the first membrane and having a first opening portion; a second chip including a second membrane and a frame supporting the second membrane and having a second opening portion; and a sample holding member. The first chip and the second chip are disposed such that the first membrane and the second membrane face each other and the first opening portion and the second opening portion overlap each other in a top view. The sample holding member is disposed on the second membrane in a manner of straddling a contour of the second opening portion in the top view. The sample is attached to a region located in the second opening portion in the top view of the sample holding member.