ENZ TE Pass Polarizer for CMOS Integration

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Solution Overview

Problem

Current TE pass polarizers in integrated optical circuits face challenges in efficiently filtering out TM-mode light while maintaining compatibility with semiconductor-based integrated circuits and reducing the size of circuit elements.

Innovation Solution

A TE pass polarizer design incorporating an input/output layer, a buffer layer, a layer of ENZ material, and a metal-containing capping layer, fabricated using techniques like CVD and etching, which effectively separates and confines light to allow only TE mode to pass through, while absorbing or attenuating TM mode.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a basic TE-pass polarizer uses a sandwich layer system with dielectric and metallic layers, then TM-mode light is effectively blocked, but the structure occupies larger area and is difficult to integrate with CMOS-based transistors

Engineering Contradiction:
ImproveTM-mode blocking efficiencyVSAvoidpolarizer footprint
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The polarizer structure is nested within the waveguide geometry, with the metallic layer patterned as stripes or gratings inside the waveguide cross-section. This nesting approach allows the polarizer function to be integrated within the existing waveguide footprint without requiring additional lateral space, thereby reducing the overall device area while maintaining TM-mode blocking efficiency.

Inventive Principle:
Principle #7Nested doll (Nesting)

Solution Approach 2:

The invention transitions from a planar sandwich layer structure to a three-dimensional waveguide-integrated structure. By utilizing the vertical dimension of the waveguide and patterning metallic elements within the waveguide cross-section, the polarizer achieves compact integration without sacrificing filtering performance. This dimensional transformation enables compatibility with standard waveguide geometries and reduces footprint.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Area of stationary object

If the polarizer structure is reduced in size, then integration density improves, but filtering efficiency and light confinement may deteriorate

Engineering Contradiction:
Improvepolarizer footprintVSAvoidlight confinement efficiency
Core Design Contradiction:
Area of stationary objectVSReliability

Solution Approach 1:

The polarizer employs a composite structure combining dielectric waveguide materials with patterned metallic layers. This composite approach allows the metallic elements to provide strong TM-mode confinement and absorption within a compact volume, while the dielectric waveguide maintains TE-mode propagation. The synergistic combination of materials enables efficient filtering in a reduced footprint.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The metallic filtering layers are selectively positioned and patterned within specific regions of the waveguide cross-section, creating local variations in electromagnetic properties. This local quality approach concentrates the TM-mode blocking function in specific zones while preserving TE-mode transmission in other regions, achieving efficient filtering without requiring the entire waveguide cross-section to be occupied by filtering structures.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design ensures high confinement of light with minimal loss, achieving strong TE mode filtering and compatibility with semiconductor-based integrated circuits, while allowing for reduced footprint of polarizer structures.

Implementation Method 1

a layer of ENZ material positioned above at least a portion of the first buffer layer

Methodology Applied
Scientific EffectEpsilon-near-zero (ENZ) effect:

Implementation Method 2

TM-polarized light is coupled to the surface plasmons of the metallic layer and absorbed

Methodology Applied
Scientific EffectSurface plasmon resonance:

Data Source

PatentUS20210003776A1Transverse-electric (TE) pass polarizer
Publication Date: 2021.01.07 GLOBALFOUNDRIES US INC
  • US20210003776A1 patent drawing
  • US20210003776A1 patent drawing
  • US20210003776A1 patent drawing

AI summary

One illustrative TE pass polarizer disclosed herein includes an input/output layer, a first buffer layer positioned above at least a portion of the input/output layer, a layer of epsilon-near-zero (ENZ) material positioned above at least a portion of the first buffer layer, and a metal-containing capping layer positioned above at least a portion of the layer of ENZ material.