Epitaxial Cladding Layer for Optoelectronic Light Confinement

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Solution Overview

Problem

Conventional optoelectronic devices operating at 1310 nm wavelengths face issues such as large footprint, high parasitic capacitance, polarization dependency, and limited operational bandwidth due to the necessity of a silicon seed layer and buried oxide layer, which complicates device fabrication and performance.

Innovation Solution

The optoelectronic device eliminates the buried oxide layer by using an epitaxial crystalline cladding layer with a lower refractive index than the optically active region, allowing for improved light confinement and reduced parasitic capacitance, thereby optimizing mode match and device yield.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a buried oxide layer and silicon seed layer are used in conventional optoelectronic devices, then light confinement is achieved, but device footprint increases and parasitic capacitance increases

Engineering Contradiction:
Improvelight confinementVSAvoiddevice footprint
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The patent removes the buried oxide layer and reduces the silicon seed layer thickness to eliminate unnecessary components that increase device footprint and parasitic capacitance, while maintaining light confinement through optimized cladding layer design

Inventive Principle:
Principle #2Taking out (Extraction)

2Reliability

If a buried oxide layer and thick silicon seed layer are used, then light confinement is improved, but manufacturing complexity and fabrication difficulty increase

Engineering Contradiction:
Improvelight confinementVSAvoidfabrication complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent eliminates the buried oxide layer removal process and simplifies the seed layer structure, reducing the number of fabrication steps and improving manufacturing yield while maintaining effective light confinement

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent optimizes the thickness parameters of the cladding layer and seed layer to achieve the necessary light confinement with simpler fabrication processes, changing the dimensional parameters to reduce complexity

Inventive Principle:
Principle #35Parameter changes

3Reliability

If a thin silicon layer is used to maintain coupling efficiency, then coupling between waveguides is improved, but manufacturing precision requirements increase due to etching variability

Engineering Contradiction:
Improvecoupling efficiencyVSAvoidetching precision
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The patent uses a thicker cladding layer that is eventually removed or serves as a sacrificial layer during fabrication, allowing for more tolerant etching processes while maintaining final coupling efficiency

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Solution Approach 2:

The patent changes the thickness parameters of the cladding and active regions to provide a larger process window for etching, reducing the precision requirements while maintaining coupling efficiency

Inventive Principle:
Principle #35Parameter changes

4Reliability

If conventional waveguide structures with buried oxide are used, then light guidance is achieved, but operational bandwidth is limited and polarization dependency increases

Engineering Contradiction:
Improvelight guidanceVSAvoidoperational bandwidth
Core Design Contradiction:
ReliabilityVSAdaptability or versatility

Solution Approach 1:

The patent uses composite cladding layer structures with different materials having different refractive indices to achieve superior light guidance properties that support broader bandwidth and reduced polarization dependency compared to conventional single-material structures

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution results in lower coupling loss, higher device speed, and reduced sensitivity to manufacturing process variations, leading to improved performance and easier fabrication with better uniformity and higher yields.

Implementation Method 1

the epitaxial crystalline cladding layer has a refractive index which is less than a refractive index of the optically active region, such that optical power of the optoelectronic device is confined to the optically active region

Methodology Applied
Scientific EffectTotal internal reflection: Total Internal Reflection

Data Source

PatentUS10921616B2Optoelectronic device
Publication Date: 2021.02.16 SICILY MERGER SUB II INC
  • US10921616B2 patent drawing
  • US10921616B2 patent drawing
  • US10921616B2 patent drawing

AI summary

An optoelectronic device and method of making the same. The device comprising: a substrate; an epitaxial crystalline cladding layer, on top of the substrate; and an optically active region, above the epitaxial crystalline cladding layer; wherein the epitaxial crystalline cladding layer has a refractive index which is less than a refractive index of the optically active region, such that the optical power of the optoelectronic device is confined to the optically active region.