Epitaxial Apparatus Insulation for Thermal Stability

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Solution Overview

Problem

Existing epitaxial apparatuses face issues with heat flow and temperature drops in the upper lid member and susceptor ring, leading to contamination, reduced cleaning efficiency, and substrate slippage due to thermal stress differences.

Innovation Solution

The epitaxial apparatus incorporates a covering member to insulate the upper lid member and holding member, reducing heat loss and thermal radiation, which suppresses temperature drops and maintains substrate stability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the clamp ring is cooled to prevent O ring distortion, then the O ring can withstand heat, but heat flows from the upper dome to the clamp ring causing temperature drop and contamination

Engineering Contradiction:

ImproveO ring heat resistanceVSAvoidupper dome temperature

Core Design Contradiction:

ReliabilityVSTemperature

Solution Approach 1:

A thermal insulation layer is introduced as an intermediary between the clamp ring and the upper dome. This insulation layer blocks the heat flow path from the upper dome to the cooled clamp ring, preventing the temperature drop in the upper dome while maintaining the cooling function of the clamp ring for O ring protection.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The clamp ring structure is segmented into distinct functional zones: a cooling portion that contacts the O ring and can be actively cooled, and an insulated portion that thermally isolates the upper dome. This segmentation allows the cooling function to be localized to where it is needed (O ring protection) without affecting the upper dome temperature.

Inventive Principle:

Principle #1Segmentation

2Reliability

If the susceptor ring temperature drops due to heat flow to the clamp ring, then the clamp ring can be cooled, but substrate slippage occurs due to temperature distribution

Engineering Contradiction:

Improveclamp ring cooling functionVSAvoidsubstrate temperature uniformity

Core Design Contradiction:

ReliabilityVSStability of the object's composition

Solution Approach 1:

The thermal insulation layer acts as a mediator that blocks the unwanted heat flow from the susceptor ring to the cooled clamp ring portion. This prevents the temperature drop in the susceptor ring that would otherwise cause substrate slippage, while allowing the clamp ring to maintain its cooling function for sealing reliability.

Inventive Principle:

Principle #24Intermediary (Mediator)

3Reliability

If the upper dome is held in tight contact with the clamp ring, then sealing is improved, but heat escapes easily through the clamp ring causing temperature drop

Engineering Contradiction:

Improvesealing performanceVSAvoidheat loss through clamp ring

Core Design Contradiction:

ReliabilityVSLoss of energy

Solution Approach 1:

The clamp ring is segmented into a sealing portion that maintains tight contact with the upper dome for sealing, and a thermally insulated portion that prevents heat escape. The insulation layer is positioned to block heat flow while maintaining the necessary thermal contact for sealing performance.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different portions of the clamp ring are given different thermal properties: the sealing portion maintains good thermal contact for sealing, while the insulated portion has reduced thermal conductivity to prevent heat loss. This local differentiation of thermal properties resolves the contradiction between sealing and heat retention.

Inventive Principle:

Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution effectively reduces residual products on the upper lid member, prevents substrate slippage, and enhances cleaning efficiency by maintaining a consistent temperature, thereby improving the overall performance of the epitaxial process.

Implementation Method 1

a cooling unit inside to cool down a portion that holds said upper lid member

Methodology Applied

Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

a heating unit to heat a region surrounded by said external wall, said supporting member, said inner lid member, and said upper lid member

Methodology Applied

Scientific EffectThermal radiation: Thermal Radiation

Implementation Method 3

a heating unit to heat a region surrounded by said external wall, said supporting member, said inner lid member, and said upper lid member

Methodology Applied

Scientific EffectConvection: Convection

Implementation Method 4

a covering member provided so as to cover the surface of at least one of said upper lid member and said holding member

Methodology Applied

Scientific EffectThermal insulation: Thermal Insulation

Data Source

PatentUS7785419B2Epitaxial apparatus

Publication Date: 2010.08.31 SUMCO CORP

AI summary

An epitaxial apparatus, including a supporting member to support a substrate; an external wall provided to surround the supporting member from the sides; an inner lid member provided in a removable manner on the external wall and covering at least a part of a gap between the supporting member and the external wall; an upper lid member that covers the substrate in a region surrounded by the external wall; a holding member that is held by the external wall, holds the upper lid member so that the upper lid member is sandwiched between the holding member and the external wall, and has a cooling unit to cool down a portion that holds the upper lid member; a heating unit; and a covering member provided so as to cover the surface of at least one of the upper lid member and the holding member.