Connected Epitaxial Optical Sensing Chips With Trench Isolation
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Solution Overview
Problem
In optical sensing systems, integrating a light source and a detector on the same epitaxial chip can lead to leakage current, which masks the detector current and reduces the accuracy of optical property measurements.
Innovation Solution
The epitaxial chips are configured to operate dependently, with the detector on one chip measuring the optical properties of a light source on another chip, and electrical isolation is achieved by creating a trench deeper than the conductive layers, reducing leakage current.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the light source and detector are integrated on the same epitaxial chip, then the device complexity is reduced, but leakage current flows from the light source to the detector which masks the detector current
Solution Approach 1:
The invention segments the epitaxial chip into distinct regions by forming a trench that physically separates the light source and detector. This segmentation prevents leakage current paths while maintaining integration benefits, resolving the contradiction between reduced device complexity and maintained measurement precision.
Solution Approach 2:
The invention extracts the conductive layer from between the light source and detector by removing material to form a trench. This extraction eliminates the leakage current path through the conductive layer, allowing accurate detector current measurement while keeping both components on the same chip.
2Device complexity
If the light source and detector are integrated on the same epitaxial chip, then the device complexity is reduced, but the leakage current masks the detector current
Solution Approach 1:
The conductive layer that enables leakage current is extracted by forming a trench through it. This removes the harmful leakage current path while maintaining the integrated structure, resolving the contradiction between simplified device complexity and elimination of harmful leakage current.
Solution Approach 2:
The invention converts the potentially harmful leakage current issue into a benefit by using the trench formation process to both reduce structural complexity and eliminate the leakage path. The same structural feature that simplifies integration also prevents the harmful effect.
3Object-generated harmful factors
If a trench is created to electrically isolate the light source and detector, then leakage current is reduced, but the manufacturing complexity increases
Solution Approach 1:
The trench formation process is merged with the existing epitaxial growth and fabrication工艺流程. By integrating the trench formation into the standard manufacturing sequence, the additional complexity is minimized and the process becomes a natural extension of existing fabrication steps.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for accurate measurement of optical properties without leakage current interference, enabling efficient operation of optical sensing systems with reduced complexity and number of epitaxial chips.
Implementation Method 1
the detector can be configured for measuring the optical properties of the light emitted by a light source
Data Source
AI summary
A device including a plurality of epitaxial chips is disclosed. An epitaxial chip can have one or more of a light source and a detector, where the detector can be configured to measure the optical properties of the light emitted by a light source. In some examples, one or more epitaxial chips can have one or more optical properties that differ from other epitaxial chips. The epitaxial chips can be dependently operable. For example, the detector located on one epitaxial chip can be configured for measuring the optical properties of light emitted by a light source located on another epitaxial chip by way of one or more optical signals. The collection of epitaxial chips can also allow detection of a plurality of laser outputs, where two or more epitaxial chips can have different material and/or optical properties.